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K1050X Technical Specification

Instrument case: 450mm W x 350mm D x 300mm H.
Barrel work chamber: Quartz glass 160mm long x 110mm diameter.
Rack out drawer: Sliding draw assembly with sample holder tray.
Plasma output: RF power supply - solid state 150W RF peak, normal operating range 25 to 75 W at 13.56Mhz. (Note: The frequency used is that allocated by the International Standards CISPR as an allowed 'industrial' frequency.)
Vacuum gauge: Active gauge head with fully operating vacuum range display (atmosphere to 1x10-5 mbar. Normal operating vacuum 0.5mbar to1.0mbar).
Timer: Displays elapsed time with range select: 99.9 hours with automatic termination of the plasma process.
Dual gas flow gauges: Dual gas needle valve flow control, selectable for either or both gases (calibrated 5 to 100cm3 / minute air at A.T.P.)
Weight: 25Kg.
Electrical supply: 230V 50Hz (5 amp maximium including pump) 115 V 60Hz (10 amp maximium, including pump).
Services: Process gas at nominal 5 psi, (0.33bar).
Vacuum pump: 90 l/m two-stage rotary pump with oil mist exhaust filter (E5005G). If oxygen is to be used as a process gas then a 'Fomblined" rotary pump is recommended (E5005GZ and E5005Z Fomblin oil).
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