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K1050X RF Plasma Barrel Reactor Site Requirements

Mains electricity supply

A suitable mains electricity supply (230V 50Hz (5 amp maximium including pump) 115 vV 60Hz (10 amp maximium including pump) is available. Check that the voltage label attached to the side of the cabinet is suitable for the local voltage and frequency.

The units are supplied for either 230V or 110V operation at 50/60Hz.

Position

The K1050X should be positioned in the laboratory convenient for the process gas supply / or cylinders and needs to have safe venting of toxic process gases.

There needs to be adequate access to the rear of the unit for gas and vent connections.

Vacuum pump

Ensure the rotary pump is filled with oil in accordance with the manufacturers instructions. The exhaust should be filtered or expelled to a safe area. All pumps supplied by Quorum Technologies are fitted with an exhaust filter.

Rotary pumps and process gases

When using RF plasma equipment certain precautions are necessary with regard to rotary pumps and exhaust gases.

If the process gas is oxygen it is essential that " Fomblin - a non-hydrocarbon oil - is used. Therefore a Fomblinised pump with Fomblin oil should be used.

For process gases that contain fluorine or chlorine precautions must be taken for the safe removal of exhaust gases from the pump as they may contain free halogens.

Some etching gases - such as sulphur hexafluoride - require special rotary pump oils. If in doubt please contact the Quorum Technologies, or the manufacturers of the rotary pump.

Space requirements

450mm wide x 350mm deep x 300 mm. Weight: 25Kg. Additional space is required for the rotary pump, which can be located either on the floor or on the bench with the K1050X.