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Ordering Information for the K575X
| PART NUMBER | DESCRIPTION |
|---|---|
| EK3137 |
K575X Turbo Sputter Coater Turbo molecular pumping and Peltier cooled sputter head for ultimate sputtering performance. For noble and oxidising targets, i.e. gold, chromium, high-resolution cool magnetron head. Chamber size: 165mm diameter x 125mm H. Base size: 110mm diameter x 115mm H. Fitted with TK8845 0.2mm thick chromium target as standard. Alternative target materials can be specified. |
| REQUIREMENT | |
|
E5005F EK5030
|
RV3 two stage rotary pump, approximately 4m3/Hr with vacuum hose, coupling kit and oil mist filter
OPTIONAL & ACCESSORY ITEMS Care kitsComprising: oil, tork roll, gloves, oil mist filter, glass cylinder, L-gaskets, polish and choice of sputtering target K575X Cr equipment care Kit (If fitted with a Cr target) |
|
EK3035 EK5040 EK5045 |
Alternative kits: K575X Au care kit K575X Au/Pd care kit K575X Pt care kit |
| EK3120 |
K250 carbon attachment (fibre) Carbon fibre head and power supply, includes 100cm A0819 carbon fibre cord. |
| A0819 | 100cm carbon fibre cord (high purity) |
| A0816 | 100cm carbon fibre cord (standard purity) |
| EK3120R |
K250 carbon attachment (rod) Carbon rod head and power supply, includes two carbon rods (3.05mm diameter x 150m). |
| EK4165 |
K150X FTM Film Thickness Monitor attachment (with controller mounted in the K575X consol) Including monitor and stage complete with quartz crystal holder and quartz crystal |
| EK3115 |
K150X FTM free-standing Film Thickness Monitor attachment. Note: free-standing version must be specified if optional K250 is fitted. Including monitor and stage complete with quartz crystal holder and quartz crystal. |
| FT553 | Spare quartz crystals for K150X. Pack of three. |
K575X/K575X/K675X Targets
| Part Number | Part Description |
|---|---|
| TK8845 | 54mm diameter x 0.2mm chromium target |
| TK8846 | 57mm diameter x 0.5mm tungsten target |
| TK8859 | 57mm diameter x 0.1mm gold target |
| TK8860 | 57mm diameter x 0.1mm Au/Pd target |
| TK8861 | 57mm diameter x 0.1mm platinum target |
| TK8862 | 54mm diameter x 1.5mm chromium target |
| TK8867 | 57mm diameter x 0.2mm tungsten target |
| TK8869 | 54mm diameter x 1.5mm carbon target |
| TK8870 | 57mm diameter x 0.1mm copper target |
| TK8871 | 57mm diameter x 0.1mm silver target |
| TK8872 | 57mm diameter x 0.1mm nickel target |
| TK8875 | 57mm diameter x 1.0mm aluminium target |
| TK8877 | 57mm diameter x 0.1mm palladium target |
| TK8878 | 57mm diameter x 0.1mm Pt/Pd (80/20%) target |
| TK8879 | 57mm diameter x 1.5mm titanium target |
| TK8887 | 57mm diameter x 0.3mm Pt/Pd (80/20%) target |
| TK8889 | 57mm diameter x 0.3mm gold target |
| TK8891 | 57mm diameter x 0.3mm Au/Pd (60/40%) target |
| TK8893 | 57mm diameter x 0.3mm platinum target |
| TK8895 | 57mm diameter x 0.5mm titanium target |
| TK8897 | 57mm diameter x 0.1mm iron target |
| TK8899 | 57mm diameter x 0.2mm iridium target |
| TK8900 | 57mm diameter x 0.1mm cobalt target |
| TK8902 | 57mm diameter x 0.1mm tin target |
| TK8903 | 57mm diameter x 0.1mm molybdenum target |
| TK8905 | 57mm diameter x 0.3mm magnesium target |
| TK8906 | 57mm diameter x 0.1mm tantalum target |
| TK9000 | 57mm diameter x 0.76mm alumina target |
| N/A | 57mm diameter x 0.3mm ITO target |
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