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CC7650 SEM Carbon Coater Site Requirements

Mains electricity supply

Ensure that a suitable mains electricity supply (110 Vac - 20amps or 240 Vac - 13amps, frequency 50/60 Hz) is available. Check that the voltage label attached to the side of the cabinet is suitable for the local voltage and frequency.
The units are supplied for either 230V or 110V operation at 50/60Hz. The power rating is 1.5KVA maximum excluding the rotary pump. The rotary pump outlet is rated at 230V 10A or 110V at 16A. The 240V pump outlet uses a 3-pin plug (404440310), which is supplied, or 110V standard US plug (supplied).

Gas Supply

Generally gas is NOT required. However, venting to a dry bottled source does can give faster pumping speeds. If gas is to be used for venting the system, ensure that a suitable gas supply is available. Typically a commercial cylinder of high purity argon gas, fitted with a two-stage regulator, in order to deliver gas at a pressure around 5-10 psi (0.7bar).

Vacuum Pump

Ensure that a suitable vacuum pump is available. The work chamber has to be evacuated to <10-2 mbar. This can be achieved in a reasonable time (depending on the cleanliness of the chamber) using a floor mounted 90 l/m two stage rotary pump, preferably incorporating an anti-suck back device and fitted with an oil mist filter on the exhaust port. Ensure that the rotary pump has been filled with oil, in accordance with the manufacturer’s instructions. The exhaust should be filtered or expelled to a safe area. All pumps supplied by Quorum Technologies are fitted with an exhaust filter.

Space requirement

340mm wide x 320mm deep x 310 mm high (including chamber and sputtering head). Weight: 14Kg. Addition space is required for the rotary pump, which can be located either on the floor or on the bench with the coater.