These targets are fitted to the E5000, E5200, E5400, SC502, SC7610 and SC7620 sputter coaters.
Targets are 57mm foil, 0.1mm thick
| Part number | Material |
|---|---|
| SC502-314A | Gold |
| SC502-314B | Gold / Palladium |
| SC502-314C | Platinum |
| SC502-314D | Nickel |
| SC502-314E | Silver |
| SC502-314G | Palladium |
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