These targets are fitted to the E5175 sputter coater.
Targets are annular (115mm OD, 92mm ID), 0.1mm thick and supplied as an assembly mounted on an aluminium ring holder.
| Part number | Material |
|---|---|
| E5175-314A | Gold |
| E5175-314B | Gold / Palladium |
| E5175-314C | Platinum |
| E5175-314D | Nickel |
| E5175-314E | Silver |
| E5175-314G | Palladium |
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