Back to Products Back to E6700 and E6300
Ordering Information for the E6700 and options for the obsolete E6300
| E6700 | Specify Voltage and Frequency |
|---|---|
| Dimensions | 800mm wide x 430mm deep x 840mm high (500mm less bell jar and implosion guard) |
| Weight | 70kg |
| Fitted with | Turbo molecular pump. (No valving) Two Pirani and Penning gauge heads plus meters 10V/100A and 20V/50A switchable power supply Work chamber jigging with 300mm (12") stainless steel baseplate 10 electrode feed-through positions Jigging set comprising, carbon and filament evaporation sources, tiltable substrate holder 250mm (10") diameter bell jar and implosion guard Vacuum hose Spare fuses Carbon rods Evaporation baskets |
Options and Accessories for E6700 and obsolete E6300
E5005G Two stage 90 1/m rotary pump with oil
mist filter (240V 50Hz)
E5005GX Two stage 90 1/m rotary pump with oil mist filter (115/230V
60Hz)
E6750 Internal turbo air cooling unit (E6700 only)
E6365 Liquid Nitrogen cold trap (E6300 only)
E6746 Rotary source shutter
E6790 Terminating Film Thickness Monitor (requires E5511 or E5515)
E5511 Crystal holder, feed-through and oscillator for FTM
E5515 Water0cooled crystal holder, feed-through and oscillator for
FTM
E6760 3kV power supply unit for sputtering, etching and glow discharge
(see E6762, E6773)
E6762 Glow discharge work chamber jigging and baseplate electrodes
E6773 Sputtering set with series II head, Gold annular target (SC510-314A)
and high voltage feed-through for use with E6760
E6744/E6445 Variable power supply unit for E6344 E6348 and E6748 (E6445
for E6300: E6744 for E6700)
E6344 Rotary planetary stage ("Rota Cota")
E6348 Rotary spin table (6")
E6478 Low angle shadowing set
E4860 1/5 HP recirculating heater / chiller
Spare or additional targets for E6773 sputtering head
All targets are annular, 0.1mm thick and are supplied as an assembly
SC510-314A Gold target
SC510-314B Gold / Palladium target
SC510-314C Platinum target
SC510-314D Nickel target
SC510-314E Silver target
SC510-314F Palladium target