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Ordering Information for the E6700 and options for the obsolete E6300

E6700 Specify Voltage and Frequency
Dimensions 800mm wide x 430mm deep x 840mm high (500mm less bell jar and implosion guard)
Weight 70kg
Fitted with Turbo molecular pump. (No valving)
Two Pirani and Penning gauge heads plus meters
10V/100A and 20V/50A switchable power supply
Work chamber jigging with 300mm (12") stainless steel baseplate
10 electrode feed-through positions
Jigging set comprising, carbon and filament evaporation sources, tiltable substrate holder
250mm (10") diameter bell jar and implosion guard
Vacuum hose
Spare fuses
Carbon rods
Evaporation baskets

Options and Accessories for E6700 and obsolete E6300

E5005G Two stage 90 1/m rotary pump with oil mist filter (240V 50Hz)
E5005GX Two stage 90 1/m rotary pump with oil mist filter (115/230V 60Hz)
E6750 Internal turbo air cooling unit (E6700 only)
E6365 Liquid Nitrogen cold trap (E6300 only)
E6746 Rotary source shutter
E6790 Terminating Film Thickness Monitor (requires E5511 or E5515)
E5511 Crystal holder, feed-through and oscillator for FTM
E5515 Water0cooled crystal holder, feed-through and oscillator for FTM
E6760 3kV power supply unit for sputtering, etching and glow discharge (see E6762, E6773)
E6762 Glow discharge work chamber jigging and baseplate electrodes
E6773 Sputtering set with series II head, Gold annular target (SC510-314A) and high voltage feed-through for use with E6760
E6744/E6445 Variable power supply unit for E6344 E6348 and E6748 (E6445 for E6300: E6744 for E6700)
E6344 Rotary planetary stage ("Rota Cota")
E6348 Rotary spin table (6")
E6478 Low angle shadowing set
E4860 1/5 HP recirculating heater / chiller

Spare or additional targets for E6773 sputtering head

All targets are annular, 0.1mm thick and are supplied as an assembly

SC510-314A Gold target
SC510-314B Gold / Palladium target
SC510-314C Platinum target
SC510-314D Nickel target
SC510-314E Silver target
SC510-314F Palladium target

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