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E6700 Bench Top Evaporator Site Requirements

Mains electricity

Ensure that a suitable mains electricity supply (110 Vac - 20amps or 240 Vac - 13amps, frequency 50/60 Hz) is available. Check that the voltage label attached to the side of the cabinet is suitable for the local voltage and frequency.
The units are supplied for either 230V or 110V operation at 50/60Hz. The power rating is 1.5KVA excluding the rotary pump. The rotary pump outlet is rated at 230V 10A or 110V at 16A. The 240V pump outlet uses a 3-pin plug (404440310) which is supplied or 110V standard US plug.

If the optional FT7690 Film Thickness Monitor is supplied this will require an additional mains electricity supply (110 Vac or 240 Vac, frequency 50/60 Hz) .
Rating is 6 amps.

Gas

Ensure that a suitable gas supply is available.
Typically: A commercial cylinder of Nitrogen gas for venting and a cylinder of Argon gas (Zero Grade) for sputtering (if optional sputtering set is fitted). Both cylinders should be fitted with two stage regulators in order to deliver gas at a pressure around 5-10 psi (0.5bar).
Note: venting to nitrogen gas is not essential, but recommended as it improved the overall cleanliness of the system, resulting in improved pump down speeds and better ultimate vacuum.

Rotary vacuum pump

Ensure that a suitable rotary vacuum pump is available. The rotary pump must be filled with oil, in accordance with the manufacturer’s instructions. The exhaust should be filtered or expelled to a safe area. All pumps supplied by Quorum Technologies are fitted with an exhaust filter.

Space requirement

620mm wide x 500mm deep x 840 mm high (including chamber). Weight: 70Kg. Addition space is required for the rotary pump, which can be located either on the floor or on the bench with the coater.