Back to Products

The K150X Film Thickness Monitor (FTM)

Accuracy, reproducibility and convenience...

Accurate measurement and control of the thickness of sputtered films is often critical in achieving the desired results. The Polaron FT7690 Film Thickness Monitor is an easy to use module that not only allows measurement of films, but is also able to terminate the deposition process at a predetermined thickness.

The K150 consists of a control unit external to the K575X and a crystal holder with an interconnection lead and oscillator. A vacuum collar is supplied to suit the appropriate instrument chamber.

The quartz crystal is mounted in the vacuum chamber so that one face of the crystal is exposed towards the deposition source.

The crystal is connected via a vacuum feed through to an external oscillator whose output is controlled by the frequency of crystal oscillation. As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This 'modification' is used to determine the thickness of material deposited and is displayed digitally on the FTM module.