: ::: :: :

SC7640 Sputter Coater Site Requirements

Electrical

Ensure that a suitable mains electricity supply (110 Vac - 20amps or 240 Vac - 13amps, frequency 50/60 Hz) is available. Check that the voltage label attached to the side of the cabinet is suitable for the local voltage and frequency.
The units are supplied for either 230V or 110V operation at 50/60Hz. The power rating is 250VA excluding the rotary pump. The rotary pump outlet is rated at 230V 10A or 110V at 16A. The 240V pump outlet uses a 3-pin plug (404440310) which is supplied or 110V standard US plug (supplied).

Sputtering Gas

Ensure that a suitable gas supply is available.
Typically: A commercial cylinder of argon gas (Zero Grade), fitted with a two stage regulator, in order to deliver gas at a pressure around 5-10 psi (0.7bar).

Vacuum Pump

Ensure that a suitable vacuum pump is available. The work chamber has to be evacuated to <10-2 mbar. This can be achieved in a reasonable time (depending on the cleanliness of the chamber) using a floor mounted 90 l/m two stage rotary pump, preferably incorporating an anti-suck back device and fitted with an oil mist filter on the exhaust port. Where a rotary pump is used, ensure that the rotary pump has been filled with oil, in accordance with the manufacturers instructions. The exhaust should be filtered or expelled to a safe area. All pumps supplied by Quorum Technologies are fitted with an exhaust filter.
Carbon evaporation attachment (optional).
CA7625 carbon evaporation power supply and either CA076F carbon fibre evaporation head or CA076R carbon rod evaporation head can be used in conjunction with the SC7640 sputter coater. The units are supplied for either 230V or 110V operation at 50/60Hz. Ensure that a suitable mains electricity supply (110 Vac - 20amps or 240 Vac - 13amps, frequency 50/60 Hz) is available. Check that the voltage label attached to the side of the cabinet is suitable for the local voltage and frequency.
Water cooling WS7608 stage (optional)
This service is not required, unless the water-cooled stage option is fitted. Ensure that a suitable supply of cooling water is available, a flow rate of 1 - 3 litres / minute of clean water is required. If a closed circuit recirculating chiller is used, avoid operating below the dew point.

FT7690 Film Thickness Monitor (optional)

Ensure that a suitable mains electricity supply (110 Vac or 240 Vac, frequency 50/60 Hz) is available. Check that the voltage label attached on the rear of the cabinet is suitable for the local voltage and frequency.
Connect the power lead to a suitable three-pin power plug of adequate rating (6 amps) and ensure that a proper earth (ground) connection is made.

Space requirements

455mm wide x 375mm deep x 145mm high (375mm including chamber and sputtering head). Weight is 35kg. Addition space is required for the rotary pump, which can be located either on the floor or on the bench with the coater.