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Two Year Spares Kit for the SC7620 Sputter Coater
Kit part number
SC7620-2YRSPR
Kit contents
| Part Number | Description | Quantity |
|---|---|---|
| 351220430 | HOSE VACUUM 1/2 ID | 1 |
| 351270380A | TUBE EPDM 3mmID x 6mmOD | 10 |
| 354371520 | O-RING 15 x 5mm NITRILE | 5 |
| 354372820 | O-RING 28 x 5mm NITRILE | 5 |
| 405006210 | FUSE 630mA 20mm TYPE T | 5 |
| 405020310 | FUSE 2A 1.1/4 TYPE T | 5 |
| 405032210 | FUSE 3.15A 20mm TYPE T | 5 |
| 405100310 | FUSE 10A 1.1/4 TYPE T | 5 |
| 405150310 | FUSE 15A 1.1/4 TYPE T | 5 |
| 550007000 | NEEDLE VALVE ASSY DRG NO | 1 |
| SC502-314B | CONF.TARGET Au/Pd | 1 |
| CYL-002 | SC7620 Standard glass chamber | 1 |
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