SC7620 Sputter Coater Target Replacement

Back to Tech Support    Back to Service Bulletins   

In normal use, erosion of the target will occur. Initally this will be seen as triangular patterns on the surface of the target. With further use, holes in the target (generally in a triangular pattern) will become apparent. When this occurs the target should be replaced.

Target removal

 

Target Replacement

(a)    Ensure power supplies to the Sputter Coater are all set to OFF.
(b)    Hinge the top plate back, to expose the target assembly.
(c)    To release the Shroud, remove 2 x M3 socket screws. Remove the Shroud.
(d)    Unscrew and remove the Target Clamp (if the Target Clamp will not unscrew, lubricate lightly with isopropanol). Remove and discard the old target. If necessary clean the Magnet Holder and Target Clamp, using a gentle abrasive material (Scotchbrite), rinse with isopropanol and dry thoroughly.

Refit new target

For replacement Target type and number, refer to E5000 Sputter Coater Targets.
(a)    Position the new target in the Target Clamp Ring, ensure target is lying flat.
(b)    Carefully fit the Clamp over the Magnet Holder, tighten until the target is securely clamped.
(c)    Re-fit the Shroud and secure using the 2 x M3 socket screws.
(d)    Position the Top Plate assembly on the vacuum chamber and reconnect the services previously removed. Care to be taken when lowering the Top Plate onto the Glass Chamber.
(e)    When taking the system back into service carry out the Test Procedure (see manual chapter 6.1), this will ensure the system is thoroughly dried out.