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Spares list for the E5000 and E5400 Sputter Coaters
| 250002310 | LEAK VALVE ADAPTER |
| 250100010 | E5000 ELECTRODE BODY |
| 250100610 | COVER FOR HT LEAD |
| 250100910 | E5000 ELECTRODE INSULATOR |
| 250104410 | TEFLON SCREWS |
| 312635160 | TOP PLATE VENT SCREW |
| 331134560 | TOP PLATE VENT SPRING |
| 351220430 | VACUUM TUBING 1m |
| 351220433 | VACUUM TUBING 1.5m |
| 351270380A | TUBE EPDM 3mmID x 6mmOD |
| 354101020 | E5000 ELECTRODE OUTER O-RING |
| 354110820 | TOP PLATE VENT O-RING |
| 354161620 | E5000 ELECTRODE OUTER O-RING |
| 354660620 | L-GASKET 6" |
| 356170500 | VENT VALVE FOR E5100 |
| 372216540 | GLASS CYLINDER |
| 392300000 | MAGNET PAIR HR 5400 HEAD |
| 404440310 | ROTARY PUMP PLUG |
| 404440320 | ROTARY PUMP SOCKET |
| 405004210 | FUSE 400mA 20mm AS |
| 405100310 | FUSE 10A 1.1/4" TYPE T |
| 407121050 | METER PIRANI mb/Pa |
| 407135050 | METER CURRENT 50mA |
| 412523030 | RELAY 3 POLE 6013 |
| 414372340 | OPERATION SWITCH E5000 |
| 416131222 | TRANSFORMER PIRANI |
| 416362820 | TRANSFORMER 2800V 40mA |
| 416405200 | VARIAC 0.5A TYPE 301 |
| 500020100 | PIRANI GAUGE HEAD |
| 550007000 | ARGON LEAK VALVE ASSY |
| 551000000 | E5100 O-RING KIT |
| 2050201910 | TOP PLATE VENT KNOB |
| 2050202000 | TOP PLATE VENT WASHER |
| 6051000800 | TIMER MODULE ASSY |
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