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Spares list for the SC502 Sputter Coater
| 351220430 | VACUUM HOSE ½" |
| 354660420 | L-GASKET 4.5" NITRILE |
| 356170500 | VENT VALVE |
| 404930100 | SK AND LEAD HI VOLT |
| 405005210 | FUSE 630mA 20mm TYPE T RS412-734 |
| 405020230 | FUSE 2A |
| 405050310 | FUSE 5A |
| 405100310 | FUSE 10A 1.1/4" TYPE T |
| 550007000 | ARGON LEAK VALVE |
| 650002400 | DIODE BOARD |
| 650032500 | TIMER/PIRANI PCB |
| 2050200110 | GLASS CHAMBER |
| 2050201010 | INSULATING C SC502 |
| 2050201110 | ELECTRODE SC502 |
| 5050200400 | TOP PLATE ASSY SC502 |
| 6050201320 | HT LEAD ASSY SC502 |
| SC502-OKIT | O-RING KIT |
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