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Spares list for the SC510, SC515 and E5100 Sputter Coaters
| 250101710 | CLAMP RING OLIVE |
| 250104210 | TARGET HOLDER E5100/E5150 |
| 250104410 | 2BA PTFE INSULATOR SCREW |
| 351220430 | VACUUM TUBING 1m |
| 351220433 | VACUUM TUBING 1.5m |
| 351270380A | TUBE EPDM 3mmID x 6mmOD |
| 404440310 | ROTARY PUMP PLUG |
| 405004210 | FUSE 400mA 20mm AS |
| 405100310 | FUSE 10A 1.1/4" TYPE T |
| 407121050 | METER PIRANI mb/Pa |
| 407135050 | METER CURRENT 50mA |
| 412523030 | RELAY 3 POLE 6013 |
| 416131222 | TRANSFORMER PIRANI |
| 416405200 | VARIAC 0.5A TYPE 301 |
| 417530230 | PELTIER ELEMENT |
| 500020100 | PIRANI GAUGE HEAD |
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