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Spares list for the SC7640 Sputter Coater
| 372216540 | GLASS CYLINDER |
| 354660620 | L-GASKET 6.25" NITRILE |
| 351270380A | TUBE EPDM 3mmID x 7mmOD |
| BE761044A | INSULATOR DISC |
| BE762004A | INSULATOR DISC |
| 500020110 | PIRANI GAUGE HEAD |
| 416405200 | VARIAC 301 |
| 550007000 | NEEDLE VALVE ASSY |
| 407135050 | CURRENT METER |
| 407121050 | PIRANI METER |
| 405006210 | FUSE 630mA 29mm AS |
| 405010211 | FUSE 1A 20mm TYPE T |
| 405020210 | FUSE 2A 20mm TYPE T |
| 405100310 | FUSE 10A 1.1/4" TYPE T |
| 356420107 | SOLENOID VALVE 12vdc 455TA |
| SC7640-OKIT | O-RING KIT |
| SC7640-2YRSPR | 2 YEAR SPARES KIT |
| 650002400 | DIODE BOARD ASSY |
| 416362821 | TRANSFORMER 2800V LT286 |
| 416151130 | TRANSFORMER 75VA LT4704 |
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