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K850WM Large Chamber Critical Point Dryer (for 4” or 6” wafers)

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  • K850WM Large Chamber Critical Point Dryer (for 4” or 6” wafers)

K850WM Large Chamber Critical Point Dryer

Quick Overview

The K850WM is compact, bench-top instrument designed to critical point dry a complete 6"/150mm wafer. A convenient wafer holder allows rapid transfer and ensures that pre-drying does not occur.

Key Features

  • * 170mm diameter chamber - optimised for wafer/MEMS drying
  • * Vertical chamber with top-loading and bottom draining - ensures specimens do not become uncovered during drying
  • * Thermoelectric heating - accurate temperature control
  • * Fine control needle valve pressure let down - precise control
  • * Temperature monitoring and control with thermal cut-out protection
  • * Pressure monitoring with safety cut-out for over pressure
  • * Three-year warranty
For information on the K850WM and the critical point drying technique, visit our Preparation Techniques and Advantages page.

To view critical point drying images, visit our Image Gallery.

To search for and buy accessories for this product, visit our Shop. Purchases restricted to UK customers only.

Product Description

The K850WM has built-in heating and water cooling using the E4860 Recirculating Heater/Chiller. This combination will give temperature control of +5°C cooling and +35°C during heating. This ensures the critical point is accurately obtained, avoiding excess pressures or temperatures, or the need to rely on pressure relief valves to control pressure during the heating cycle.

The K850WM has a vertical chamber which allows top-loading of specimens. A viewing port is fitted in the top plate for specimen observation. The specimen exchange mechanism is simple to use and ensures the specimen remains under liquid during loading.

Specimen handling
100mm or 150mm diameter wafers are held in a PTFE holding tray. The tray including wafer is immersed in acetone in order to remove all moisture from the specimen. After dehydration, the wafer and holder are transferred into the pre-cooled specimen chamber using the wafer transfer device. On completion of the critical point drying process, the wafer is removed from the chamber using the transfer device prior to further processing.

Additional Information

Ordering Information
Requirements
K850WM (EK3205)Large Chamber Critical Point Dryer for 4” or 6” wafers
E4860 Recirculating Heater/Chiller (for cooling chamber)
EK3102 Carbon dioxide bottle heating system
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