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Q150R ES in sputtering mode

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  • Q150R ES in sputtering mode
  • Q150R ES in sputtering mode (fitted with optional FTM)
  • Colour touch screen control
  • Sputtering insert. Gold (Au) fitted as standard, but other metals available
  • ‘Cool’ sputtering. Optional film thickness monitor (FTM) fitted
  • Carbon fibre evaporation insert and automatic source shutter
  • Optional glow discharge attachment (for R S and R ES versions)
  • Base plate, standard specimen stage and optional film thickness monitor (FTM)
  • Optional flat rotation stage for 100mm/4” wafers
  • Optional rotation stage for glass microscope slides

Q150R Rotary-Pumped Sputter Coater/Carbon Coater

Quick Overview

The Q150R is a compact rotary-pumped coating system suitable for SEM sputtering with noble metals - eg gold (Au), gold/palladium (Au/Pd) and platinum (Pt) - and for carbon coating SEM specimens for EDS and WDS.

The Q150R is available in three formats:

*Q150R S - a compact rotary-pumped sputter coater, suitable for non-oxidising metals, such as gold (Au) and platinum (Pt)

*Q150R E - a compact rotary-pumped carbon fibre coater for SEM applications

*Q150R ES - a compact rotary-pumped combined sputter coater and SEM carbon coater

Key features

  • * Metal sputtering or carbon coating, or both - can be combined in one space-saving design
  • * Rotary-pumped sputter coating - allows sputtering of a range of non-oxidising (noble) metals, such as gold (Au), platinum (Pt), silver (Ag) and palladium (Pd)
  • * Carbon fibre coating - ideal for SEM carbon coating applications (EDS and WDS)
  • * Advanced design carbon evaporation gun - simple operation, reproducible results
  • * Glow discharge option - for modification of specimen surface properties (eg hydrophobic to hydrophilic conversion)
  • * Control of evaporation current profile - ensures consistently reproducible carbon films
  • * Precise thickness control using the film thickness monitor option
  • * Fully automatic touch screen control - rapid data input, simple operation
  • * Multiple, customer-defined coating schedules can be stored - ideal for multi-user laboratories
  • * Automatic vacuum control - can be pre-programmed to suit the process and material; no needle valve to adjust
  • * ‘Intelligent’ recognition of system - automatically detects the type of coating insert fitted
  • * Easy-to-change, drop-in style specimen stages (rotation stage as standard)
  • * Vacuum shut-down feature - leaves the process chamber under vacuum when not in use - improved vacuum performance
  • * Pump hold - allows the system to be held in continuous pumping mode, awaiting user input before continuing the process
  • * Thick film capabilities - up to 60 minutes sputtering time without breaking vacuum
  • * Ergonomic one-piece moulded case - easy maintenance and service access
  • * Ethernet with local FTP server connection - simple programmer updates
  • * Power factor correction - complies with the current legislation (CE Certification) - efficient use of power means reduced running costs
  • * Three-year warranty
For information on the Q150R, and the sputter and carbon coating techniques, visit our Preparation Techniques and Advantages page.

To view sputter and carbon coating images, visit our Image Gallery.

To search and buy accessories for this product, visit our Shop. Purchases restricted to UK customers only.

Product Description

Ideal for SEM sputtering and carbon coating applications
The Q150R is available in three formats: sputtering, carbon evaporation or both. Depending upon the selected configuration, the Q150R can be a sputter coater for scanning electron microscopy (SEM), a carbon coater suitable for SEM (eg EDS and WDS), or both - in a single easy-to-use system.

Moulded case with colour touch screen
The Q150R is presented in a custom moulded, one-piece case - allowing easy servicing access. The colour touch screen allows multiple users to input and store coating ‘recipes’. The case houses all the working components, with an automatic bleed control that ensures optimum vacuum conditions during sputtering.

The vacuum chamber has an internal diameter of 165mm/6” and comes with an integral implosion guard. The Q150R also includes ‘vacuum shutdown’, which enhances vacuum performance by allowing the chamber vacuum to be maintained when the system is not in use.

A variable speed rotary specimen stage is fitted as standard, with other stages available as options - see Options and Accessories.

Sputter coating, carbon coating or both
The Q150R is available in three formats, each with a range of optional accessories:

* Q150R S - a compact rotary-pumped sputter coater for non-oxidising (noble) metals. A gold (Au) target is fitted as standard, with others - such as gold/palladium (Au/Pd) and platinum (Pt) - available as options.
* Q150R E - a compact rotary-pumped carbon fibre coater, ideal for SEM EDS and WDS applications. Fitted with a carbon fibre head insert; an optional carbon rod insert is also available.
* Q150R ES - a combined system with both sputtering and carbon coating. The deposition inserts can be swapped in seconds and the intelligent system logic automatically recognises which insert is in place and displays the appropriate operating settings.

Each of the above can be fitted with a range of optional accessories (a carbon rod coating insert, film thickness monitor, glow discharge etc). See Options and Accessories for details.

Rapid data entry
At the operational heart of the Q150R is a simple colour touch screen, which allows even the most inexperienced or occasional operator to rapidly enter and store their own process data. To further aid ease of use, a number of typical sputtering and carbon coating profiles are already stored.

Maintenance
The intuitive touch screen interface features maintenance prompts which highlight:
* Time of last clean
* Coating time since last cleaned
* System ‘on time’
* Time of last service.

Additional Information

Glow Discharge Attachment The primary application of glow discharge is as a technique for the surface modification, or ‘wetting’, of newly-evaporated transmission electron microscopy (TEM) carbon support films.

Hydrophilisation
Freshly-made TEM carbon support films tend to have hydrophobic surfaces which inhibits the spreading of suspensions of particles in negative staining solutions. However, after glow discharge treatment with air, the carbon film is made hydrophilic and negatively charged, thus allowing easy spreading of aqueous suspensions. With subsequent magnesium acetate treatment the surface is made hydrophilic and positively charged.

In addition to glow discharge treatment using air, other process gases may be used to modify surface properties. For example, methanol as a process gas results in the surface becoming hydrophobic and negatively charged. Such treatment can facilitate the optional absorption of selected biomolecules
Options and Accessories (including details of coating head inserts and specimen stages that are fitted as standard)
Coating head options
A range of interchangeable, plug-in style coating head inserts are available:

* Sputtering head insert - suitable for non-oxidising (noble) metals. Supplied with a 57mm Ø x 0.1mm thick gold (Au) target as standard (R S and R ES versions). For additional targets see Ordering Information
* Additional sputter head inserts - available for quick coating material change (R S and R ES versions)
* Carbon fibre evaporation head insert - fitted as standard to R E and R ES versions
* Carbon rod evaporation head insert - for 3.05mm Ø rods (available as an option for R E and R ES versions).

Specimen stages
The Q150R has specimen stages to meet most requirements. All are easy-change, drop-in style (no screws) and are height adjustable (except rotary planetary stage):

* Rotation stage - 50mm Ø (supplied as standard). This stage only rotates - no tilt or height adjustment
* Rotate-tilt stage - 50mm Ø with height adjustment (target to stage height variable between 37-60mm). Tilt angle can be pre-set (up to 90°)
* Variable angle ‘Rotacota’ rotary planetary stage - with 50mm Ø specimen platform
* Flat rotation stage for 4"/100mm wafers
* Rotation stage for glass microscope slides.

Other options
* Extended height chamber - for tall specimens
* Film thickness monitor (FTM) - the optional FTM attachment (10454) consists of a controller and quartz crystal oscillator built into the Q150R and a vacuum feed-through, chamber-mounted crystal holder and quartz crystal. As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This ‘modification’ is used to measure and control the thickness of material deposited.
Specifications
Instrument case 585mm W x 470mm D x 410mm H (total height with coating head open: 650mm)
Weight 28.4kg
Packed dimensions 725mm W x 660mm D x 680mm H (37kg)
Work chamber Borosilicate glass 152mm ID x 127mm H
Safety shield Integral polyethylene terephthalate (PET) cylinder
Display 145mm x 320mm x 240mm colour graphic thin film transistor (TFT) display
User interface Intuitive full graphical interface with touch screen buttons, includes features such as a log of the last 10 coatings carried out and reminders for when maintenance is due
Sputter target Disc style 57mm Ø x 0.1mm thick gold (Au) target (SC502-314A) is fitted as standard. R S/R ES versions only

Vacuum
Rotary pump 50L/m two-stage rotary pump with oil mist filter (order separately, see EK3175)
Vacuum measurement Pirani gauge
Typical ultimate vacuum 2x10-2mbar in a clean system after pre-pumping with dry nitrogen gas
Specimen stage 50mm Ø rotation stage. Rotation speed 8-20 RPM. For alternative stages see Options and Accessories

Processes
Sputtering 0-80mA to a pre-determined thickness (with optional FTM) or by the built-in timer. The maximum sputtering time is 60 minutes (without ‘breaking’ vacuum and with built-in rest periods)
Carbon evaporation A robust, ripple free DC power supply featuring pulse evaporation ensures reproducible carbon evaporation from rod or fibre sources. Current pulse: 1-90A
Glow discharge Operates at 100mA in DC+ mode and 30mA in DC- mode

Services and other information
Gases Argon sputtering process gas, 99.999% (R S and R ES versions)
Nitrogen venting gas (optional)
Electrical supply 90-250V 50/60Hz 1,400VA including RV3 rotary pump power. 110/240V voltage selectable
Conformity CE conformity: Power factor correction. Complies with the current legislation (CE Certification) and ensures efficient use of power, which means reduced running costs
Ordering Information
Q150R S Rotary-Pumped Sputter Coater, including an SC502-314A 57mm Ø x 0.1mm gold (Au) sputter target
Q150R E Rotary-Pumped SEM Carbon Coater suitable for SEM applications. Fitted with a carbon fibre evaporation insert. Supplied with 1m of standard carbon fibre cord (C5421) and 1m of high purity carbon fibre cord (A0819)
Q150R ES Rotary-Pumped Sputter Coater and SEM Carbon Coater, including a TK8859 57mm Ø x 0.1mm gold (Au) target and carbon fibre evaporation coater. NB: Coating inserts are interchangeable. Supplied with 1m of standard carbon fibre cord (C5421) and 1m of high purity carbon fibre cord (A0819)

Rotary pump requirements (needs to be ordered separately)
EK3175 Edwards RV3 50L/s two-stage rotary pump, with vacuum hose, coupling kit and oil mist filter

Options and accessories
10879 Carbon rod evaporation insert for 3.05mm Ø rods (R E and R ES only). Includes S8651 manual rod shaper and C5422 (3.05mm Ø X 300mm pack of ten) carbon rods
10262 Glow discharge insert. Used to modify surface properties (eg hydrophobic to hydrophilic conversion) (R S and R ES versions only). Can be retrofitted
10726 Additional sputter insert for quick metal change (R E and R ES versions only). NB: This is an entire sputtering assembly; individual targets can also be purchased
10360 Variable angle 'Rotacota' rotary planetary specimen stage (rotational speed 8-20 RPM). 50mm Ø specimen platform with six stub positions for 15mm, 10mm, 6.5mm or 1/8" pin stubs. Stage rotation speed variable between 8-20 RPM
10357 Variable tilt angle specimen stage with adjustable tilt up to 90˚. 50mm Ø specimen platform with six stub positions for 15mm, 10mm, 6.5mm or 1/8" pin stubs. Stage rotation speed variable between 8-20 RPM
10458 Flat rotation specimen stage for 4"/100mm wafers, includes gear box for increased coverage. Stage rotation speed variable between 8-20 RPM
10358 90mm Ø specimen stage for glass microscope slides (up to two x 75mm x 25mm slides). Stage rotation speed variable between 8-20 RPM. Includes gear box to allow optional FTM to be used
10454 Film thickness monitor (FTM) attachment. Including oscillator, feed-through, quartz crystal holder and quartz crystals
10429 Extended height vacuum chamber (214mm in height - the standard chamber is 127mm high). For increased source to specimen distance and for coating large specimens
10731 Vacuum spigot allows more convenient connection of the vacuum hose to the rear of the Q150R when bench depth is limited
Sputter targets NB: The Q150R S and Q150R ES are fitted as standard with a 0.1mm thick gold (Au) target (SC502-314A). Other optional targets:
SC502-314H Copper (Cu) 57mm Ø x 0.1mm
SC502-314AGold (Au) 57mm Ø x 0.1mm
SC502-314A/0.2mmGold (Au) 57mm Ø x 0.2mm
TK8889Gold (Au) 57mm Ø x 0.3mm
TK8891Gold/palladium (Au/Pd) (80:20) 57mm Ø x 0.3mm
SC502-314BGold/palladium (Au/Pd) 57mm Ø x 0.1mm
SC502-314B/0.2mmGold/palladium (Au/Pd) 57mm Ø x 0.2mm
SC502-314D Nickel (Ni) 57mm Ø x 0.1mm
SC502-314G Palladium (Pd) 57mm Ø x 0.1mm
SC502-314C Platinum (Pt) 57mm Ø x 0.1mm
SC502-314C/0.2mmPlatinum (Pt) 57mm Ø x 0.2mm
TK8893Platinum (Pt) 57mm Ø x 0.3mm
TK8887Platinum/palladium (Pt/Pd) (80:20) 57mm Ø x 0.3mm
SC502-314E Silver (Ag) 57mm Ø x 0.1mm

Carbon supplies
A0819 Carbon fibre cord - high purity - 1m
A0819-5 Carbon fibre cord - high purity - 5m
A0830A

Carbon rods - 6.15mm Ø x 100mm length (unshaped) - pack of 10

A0832A

Carbon rods - 6.15mm Ø x 50mm length (shaped) - pack of 10

A0834A Carbon rods 3.05 Ø x 50mm, (shaped) - pack of 10
C5421 Carbon fibre cord - standard grade - 1m
C5421-10 Carbon fibre cord - standard grade - 10m
C5421-100 Carbon fibre cord - standard grade - 100m
C5422 Carbon rods 3.05 Ø x 100mm, (unshaped) - pack of 10
C5461 Carbon fibre - fine strands - 1m
C5461-10 Carbon fibre - fine strands - 10m
C5461-100 Carbon fibre - fine strands - 100m
S8650 Manual carbon rod shaper for 6.15mm carbon rods
S8651 Manual carbon rod shaper for 3.05mm carbon rods

Other consumables and spare kits
SEM BASIC-1 Starter kit - specimen stubs, boxes, mounting media, tweezers etc. NB: state type of specimen stub required when ordering
10730 Two-year spares kit for Q150R S. Includes: SC502-314A 57mm Ø x 0.1mm gold (Au) target, standard glass chamber assembly, C5460 quartz crystals, O-rings etc
10729 Two-year spares kit for Q150R E. Includes: C5421/C5461 carbon fibre/cord, standard glass chamber assembly, C5460 quartz crystals, O-rings, springs etc
10728 Two-year spares kit for Q150R ES. Includes: SC502-314A 57mm Ø x 0.1mm gold (Au) target, C5421/C5461 carbon fibre/cord, standard glass chamber assembly, C5460 quartz crystals, O-rings, springs etc
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