These targets are fitted to the E5000, E5200, E5400, SC502, SC7610, SC7620 and Q150R Series sputter coaters.
Targets are 57mm foil, 0.1mm thick or 0.2mm thick.
NB: The Q150R S and Q150R ES are fitted as standard with a 0.1mm thick gold (Au) target (SC502-314A).
| Part number |
Description |
| SC502-314A |
Gold (Au) 0.1mm thick |
| SC502-314A/0.2mm |
Gold (Au) 0.2mm thick |
| SC502-314B |
Gold/palladium (Au/Pd) 0.1mm thick |
| SC502-314B/0.2mm |
Gold/palladium (Au/Pd) 0.2mm thick |
| SC502-314D |
Nickel (Ni) 0.1mm thick |
| SC502-314G |
Palladium (Pd) 0.1mm thick |
| SC502-314C |
Platinum (Pt) 0.1mm thick |
| SC502-314C/0.2mm |
Platinum (Pt) 0.2mm thick |
| SC502-314E |
Silver (Ag) 0.1mm thick |
