These targets are fitted to the SC510, SC515, E5100, SC7640 and SC7680 sputter coaters. Targets are annular (82mm OD, 60mm ID), 0.1mm or 0.2mm thick and supplied as an assembly mounted on an aluminium ring holder.
| Part number |
Description |
| SC510-314CU |
Copper (Cu) 0.1mm thick |
| SC510-314A |
Gold (Au) 0.1mm thick |
| SC510-314A/0.2mm |
Gold (Au) 0.2mm thick |
| SC510-314B |
Gold/palladium (Au/Pd) 0.1mm thick |
| SC510-314B/0.2mm |
Gold/palladium (Au/Pd) 0.2mm thick |
| SC510-314D |
Nickel (Ni) 0.1mm thick |
| SC510-314G |
Palladium (Pd) 0.1mm thick |
| SC510-314C |
Platinum (Pt) 0.1mm thick |
| SC510-314C/0.2mm |
Platinum (Pt) 0.2mm thick |
| SC510-314E |
Silver (Ag) 0.1mm thick |
