Product Description
Ideal for SEM, high resolution FE-SEM and TEM applications
The Q150T is available in three formats: sputtering, carbon evaporation or both. Depending upon the selected configuration, the Q150T can be a top-of-the-range sputter coater for high resolution scanning electron microscopy (SEM), a carbon coater suitable for SEM and transmission electron microscopy (TEM), or both - in a single easy-to-use system.The ability of the Q150T to rapidly sputter a wide selection of oxidising and non-oxidising metals also makes it an ideal platform for many thin film applications.
Moulded case with colour touch screen
The Q150T is presented in a custom moulded, one-piece case - allowing easy servicing access. The colour touch screen allows multiple users to input and store coating ‘recipes’.The case houses all the working components, including the efficient 70L/s air-cooled turbomolecular pump. Automatic bleed control ensures optimum vacuum conditions during sputtering.
The vacuum chamber has an internal diameter of 165mm/6” and comes with an integral implosion guard. The Q150T also includes ‘vacuum shutdown’, which enhances vacuum performance by allowing the chamber vacuum to be maintained when the system is not in use.
A variable speed rotary specimen stage is fitted as standard, with other stages available as options - see Options and Accessories.
Sputter coating, carbon coating or both
The three different formats of the Q150T each include a range of optional accessories:*Q150T S - a high resolution sputter coater for oxidising and non-oxidising (noble) metals. A wide selection of sputtering targets is available, including iridium (Ir) and chromium (Cr) which are highly recommended for FE-SEM applications.
*Q150T E - a high vacuum carbon coater, ideal for the production of highly stable carbon films and surface replicas for transmission electron microscopy (TEM). The system uses economical, high purity 3.05mm Ø carbon rods.
*Q150T ES - a combined system with both sputtering and carbon coating. The deposition heads can be swapped in seconds and the intelligent system logic automatically recognises which head is in place and displays the appropriate operating settings.
Each of the above can be fitted with a range of optional accessories (metal evaporation, carbon fibre coating, film thickness monitor, etc). See Options and Accessories for details.
Rapid data entry
At the operational heart of the Q150T is a simple colour touch screen which allows even the most inexperienced or occasional operator to rapidly enter and store their own process data. To further aid ease of use, a number of typical sputtering and evaporation profiles are already stored.Additional Information
| Options and Accessories (including details of coating head inserts and specimen stages that are fitted as standard) | Coating head options:A range of interchangeable, plug-in style coating head inserts are available:* Sputtering head insert. Suitable for oxidising and non-oxidising metals. Supplied with a 54mm Ø x 0.3mm thick chromium (Cr) target as standard. For additional targets see Ordering Information * Additional sputter head insert. Available for quick coating material change (TS and TES versions only) * Carbon rod evaporation head insert (for 3.05mm Ø rods) * Carbon rod evaporation head insert (for 6.15mm Ø rods). NB: we recommend 3.05mm Ø rods as they offer greater process control and are more economical (less wastage) * Carbon fibre evaporation head insert * Metal evaporation and aperture cleaning head insert, including the ability to evaporate upwards or downwards (TE and TES versions only) Specimen stages:The Q150T has specimen stages to meet most requirements. All are easy-to-change, drop-in style (no screws) and are height adjustable (except for the rotary planetary stage):* Rotation stage, 50mm Ø (supplied as standard). This stage only rotates - no tilt or height adjustment * Rotate-tilt stage, 50mm Ø with height adjustment (target to stage height variable between 37mm and 60mm). The tilt angle can be pre-set * Variable angle ‘Rota-cota’ rotary planetary stage with 50mm Ø specimen platform * Flat rotation stage for 100mm/4” wafers * Rotation stage for glass microscope slides Other options:* Extended height chamber for tall specimens* Film Thickness Monitor (FTM). The optional 10454 consists of a controller and quartz crystal oscillator built into the Q150T, and a vacuum feed through, chamber-mounted crystal holder and quartz crystal. As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This ‘modification’ is used to measure and control the thickness of material deposited * Full range vacuum gauge for low and high vacuum measurement (a low vacuum Pirani gauge is fitted as standard) |
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| Specifications |
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| Ordering Information |
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