Product Description
Ideal for sputter coating large specimens, thin film applications and SEM/FE-SEM
The Q300T D is suitable for sputtering a range of oxidising and non-oxidising (noble) metals for scanning electron microscopy (SEM) and thin film applications. The range of target materials available is extensive - see Ordering Information. TheQ300T D comes as standard with a chromium (Cr) target and gold (Au) target.
High-vacuum turbomolecular pumping
The Q300T D is fitted with an internally mounted 70L/s turbomolecular pump, backed by a 50L/m two-stage rotary pump (order separately). A Pirani vacuum measurement gauge (range: 1,000mbar to 5x10-4mbar) is included, but a full range gauge (1,000mbar to 5x10-9mbar) is available as an option. Typical ultimate vacuum of around 5x10-5mbar can be expected in a clean system after pre-pumping with dry nitrogen gas.Dual head sputtering - for sequential sputtering
The Q300T D is fitted with two independent sputtering heads to allow sequential sputtering of two different metals without the need to ‘break’ vacuum, for example, a thin ‘seeding’ layer of chromium (Cr) followed by deposition of gold (Au). An automatic shutter mechanism is fitted to enable cleaning of oxidising sputter targets and to protect the second target and substrate during coatings. For single metal applications, one target can be selected.Specimen stages
The Q300T D is fitted with a flat rotating specimen stage capable of accepting wafers up to 4"/100mm in diameter. The rotation speed is variable between preset limits and the stage to sputtering head distance can be adjusted between 25-71mm. A range of optional specimen stages can be fitted - see Options and Accessories.Moulded case with colour touch screen
The Q300T D is presented in a custom moulded, one-piece case, allowing easy servicing access. The colour touch screen allows multiple users to input and store coating ‘recipes’. The case houses all the working components and includes an automatic bleed control that ensures optimum vacuum conditions during sputtering.The vacuum chamber has an internal diameter of 283mm/12” and comes with an integral implosion guard. The Q300T D can also be fitted with optional ‘vacuum shutdown’, which enhances vacuum performance by allowing the chamber vacuum to be maintained when the system is not in use.
Rapid data entry
At the operational heart of the Q300T D is a simple colour touch screen, which allows even the most inexperienced or occasional operator to rapidly enter and store their own process data. To further aid ease of use a number of typical sputter coating profiles are already stored. For added convenience, summaries of the last 100 coatings carried out can be viewed.Maintenance
The intuitive touch screen interface features maintenance prompts that highlight:* Time of last clean
* Coating time since last cleaned
* System ‘on time’
* Time of last service.
Additional Information
| Options and Accessories (including details of standard specimen stage) | Specimen stages:The Q300T D has specimen stages to meet most requirements. All are easy-change, drop-in style (no screws) and are height adjustable (except rotary planetary stage). Rotation speed is variable between 14-38 RPM:* Flat rotation stage for 4"/100mm wafers - fitted as standard * Flat rotation stage for 6"/150mm wafers * Rotation stage - 50mm Ø. This stage only rotates - no tilt or height adjustment * Rotate-tilt stage - 50mm Ø with height adjustment (target to stage height variable between 30-80mm). The tilt angle can be pre-set (horizontal to 30°) * Rotation stage for glass microscope slides. Other options:* Extended height chamber for taller specimens* Dual channel film thickness monitor (FTM). The optional FTM attachment (10779) consists of a controller and quartz crystal oscillator built into the Q300T D and a vacuum feed-through, two chamber-mounted crystal holders and quartz crystals. As sputtered material is deposited onto the crystal, its frequency of oscillation is modified. This 'modification' is used to measure and control the thickness of material deposited. |
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| Specifications |
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| Ordering Information |
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