Product Description
Ideal for sputter coating large specimens, thin film applications and SEM/FE-SEM
The Q300T T is suited for sputtering a range of oxidising and non-oxidising (noble) metals for scanning electron microscopy (SEM) and thin film applications. The range of target materials available is extensive - see Ordering Information.High-vacuum turbomolecular pumping
The Q300T T is fitted with an internally mounted 70L/s turbomolecular pump, backed by a 50L/m two-stage rotary pump (order separately). A Pirani vacuum measurement gauge (range: 1,000mbar to 5x10-4mbar) is included, but a full range gauge (1,000mbar to 5x10-9mbar) is available as an option. Typical ultimate vacuum of around 5x10-5mbar can be expected in a clean system after pre-pumping with dry nitrogen gas.Triple sputtering head
The Q300T T is fitted with three individual sputtering heads to ensure even deposition of individual large specimens or multiple specimens. For economical coating of small specimens, ‘single target’ mode can be selected.NB: It is not possible to sequentially sputter three different sputtering metals from each sputtering head - for sequential coating see the Q300T D Dual Target Sequential Sputtering System.
Moulded case with colour touch screen
The Q300T T is presented in a custom moulded, one-piece case - allowing easy servicing access. The colour touch screen allows multiple users to input and store coating ‘recipes’. The case houses all the working components and includes an automatic bleed control that ensures optimum vacuum conditions during sputtering.The vacuum chamber has an internal diameter of 283mm/12” and comes with an integral implosion guard. The vacuum shutdown option can enhance vacuum performance by allowing the chamber vacuum to be maintained when the system is not in use.
A variable speed rotary specimen stage is fitted as standard and accommodates 200mm/8” and 150mm/6” wafers, with other stages available as options - see Options and Accessories.
Rapid data entry
At the operational heart of the Q300T T is a simple colour touch screen, which allows even the most inexperienced or occasional operator to rapidly enter and store their own process data. To further aid ease of use, a number of typical sputter coating profiles are already stored. For added convenience summaries of the last 100 coatings carried out can be viewed.Maintenance
The intuitive touch screen interface features maintenance prompts that highlight:* Time of last clean
* Coating time since last cleaned
* System ‘on time’
* Time of last service.
Additional Information
| Options and Accessories (including details of standard specimen stage) | Specimen stages:The Q300T T has specimen stages to meet most requirements. All are easy-change, drop-in style (no screws) and are height adjustable (except rotary planetary stage). Rotation speed is variable between preset limits:* Flat rotation stage for wafers - for 200mm/8" and 150mm/6" wafers (fitted as standard) * Rotation stage - 50mm Ø. This stage only rotates - no tilt or height adjustment * Rotate-tilt stage - 50mm Ø with height adjustment (target to stage height variable between 30-80mm). The tilt angle can be pre-set (horizontal to 30°) * Rotation stage for glass microscope slides. Other options:* Extended height chamber for taller specimens* Film thickness monitor (FTM). The optional FTM attachment (11520) consists of a controller and quartz crystal oscillator built into the Q300T T and a vacuum feed-through, chamber-mounted crystal holder and quartz crystal. As sputtered material is deposited onto the crystal, its frequency of oscillation is modified. This 'modification' is used to measure and control the thickness of material deposited. NB: Cannot be used when the coater is operated in 'single target' mode. |
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| Specifications |
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| Ordering Information |
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