Choosing the right backing pump for EM sample coating systems


Pressure effects overview:

For low-resolution imaging, a majority of the SEM samples can be sputtered or carbon-coated in the pressure range of 1 x 10−1 to 1 x 10−2 mbar. A higher vacuum lower than 1 x 10−3 mbar base pressure allows the sputtering of oxidizing metals. These metals have a lower grain size ideal for high-resolution imaging. Likewise, lower scattering with the background gases enables high purity, high density, amorphous carbon films.

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