Options and Accessories
AL41041. Holder for TEM grids.
10983. Film Thickness Monitor attachment. With controller mounted in the K975X consol and including monitor and stage complete with quartz crystal holder and quartz crystal.
EK4117. Additional metal evaporation source. For filament/boat evaporation and aperture cleaning.
EK4175. Sputtering module. Including chromium (Cr) target (other targets available as options, see: Q150T for a full list).
EK4205. Rotating specimen stage (planetary style). Includes externally adjustable tilt angle.
EK4160. Low-angle shadowing attachment. Ideal for flat TEM specimens, such as DNA proteins and virus particles.
AL410123. Manually-operated source shutter.
Weight and dimensions. 450 mm W x 500 mm D x 300 mm H. Weight: 65 kg.
Work chamber. Borosilicate glass with hinged metal top plate, 250 mm Ø x 300 mm H (can accommodate wafers to 8″/200 mm if K975S is specified).
Safety shield. Polycarbonate cylinder – removable for maintenance.
Specimen stage including 0-45º tilt facility.
Low voltage evaporation supply.
Pulsed or variable control. Selectable: 0-5 V-15 V-25 V, out-gas current: 0-25 A.
100 L/s turbomolecular pump. Requires a backing rotary pump (see: 13034).
Vacuum gauge range: atmosphere to 1 x 10-7mbar.
Operating vacuum: 1 x 10-5mbar, typically achieved within 15 minutes.
Nitrogen gas -if used for venting. Argon gas – if the optional sputtering attachment is fitted.
Electrical supply. 230 V/50 Hz (8 A maximum including pump), 115 V/60 Hz (16 A maximum including pump).
Accessory kit including: carbon rods (6.15 mm Ø x 100 mm), evaporation filaments, S8651 manual rod shaper and operating manual.