Q300R T Triple Target, Large Chamber, Rotary-Pumped Sputter Coater
Fitted with three sputtering heads to ensure even metal deposition. Includes three 57 mm Ø x 0.1 mm gold (Au) sputter targets (TK8889). A 10852 flat rotation stage for 8"/200 mm and 6"/150 mm wafers is fitted as standard.
Rotary pump requirements
13034. Vacuum pump. Pfeiffer 5 m3/hr Duo 6 two-stage rotary pump with vacuum hose, coupling kit and oil mist filter.
26907. Edwards dry scroll pump nXDS10i. Pumping speed: 11.4 m3hr.
Options and accessories
10357. Rotating 50 mm Ø specimen stage with adjustable tilt. The platform has six specimen stub positions for 15 mm, 10 mm, 6. 5 mm or 1/8" pin stubs. Stage rotation speed variable between preset limits. There is no rotation when in 'single target' mode. Target-to-stage height is variable between 0-42 mm for the standard stage. When used with the extended height cylinder (optional accessory 10596) the target-to-stage height is an additional 87 mm.
10067. 50 mm Ø variable height specimen stage. With six stub positions for 15 mm, 10 mm, 6.5 mm disc stubs or 1/8" SEM pin stubs. Stage rotation speed is variable between preset limits.
10360. 50 mm Ø "Rotacoat" stage. A rotary planetary-style stage with variable tilt angle from horizontal to 300 . The platform has six positions for either 15 mm, 10 mm, 6.5 mm disc stubs or 1/8" pin stubs. Rotation speed is variable between preset limits. NB: Depending upon specimen height, this stage may require the optional extended height cylinder.
10358. 90 mm Ø specimen stage for glass microscope slides. (Up to two x 75 mm x 25 mm slides or a single 75 mm x 50 mm slide). The stage can alternatively accommodate up to six 1/8" SEM pin stubs. Stage rotation speed is variable between preset limits and includes a gear box to allow the optional FTM to be used.
11520. Film thickness monitor (FTM) attachment. Including oscillator, feed-through, quartz crystal holder and one C5460 quartz crystal.
C5460. Spare quartz crystal.
10596. Extended height vacuum chamber, 214 mm high - the standard chamber is 127 mm high. For increased source-to-specimen distance and for coating large specimens.
10731. Vacuum spigot. Allows more convenient connection of the rotary pump vacuum hose to the rear of the Q300R T - useful for when bench depth is limited.
11223. Lockable emergency stop (e-stop) switch. Can be mounted on top of the system in a position easily accessible for the operator. It is provided with a key to release the knob after activation. The addition of the e-stop does not inhibit or replace the normal on/off switch function.
10577. Coating shields. Can be fitted to protect large surfaces from unwanted coating deposition - easily removable for ease of cleaning.
11290. Two-year spares kit for Q300R T. Includes three 57 mm Ø x 0.3 mm gold (Au) targets (TK8889), standard glass chamber assembly, O-rings etc.
Special option for platinum (Pt) coating
13711. Platinum (Pt) coating vacuum hose assembly. Required for use with Pt target when a normal rotary pump is fitted.
The Q300R T is fitted as standard with three 57 mm Ø x 0.1 mm thick gold (Au) targets (TK8889)
Other optional targets are available (three required), all 57 mm in diameter and 0.1 mm thick, unless otherwise stated:
C502-314H. Copper (Cu).
SC502-314A. Gold (Au).
SC502-314A/0.2mm. Gold (Au) 0.2 mm.
TK8889. Gold (Au) 0.3 mm.
SC502-314B. Gold/palladium (Au/Pd - 80:20).
SC502-314B/0.2mm. Gold/palladium (Au/Pd - 80:20).
TK8891. Gold/palladium (Au/Pd - 60:40) 0.3 mm.
SC502-314G. Palladium (Pd).
SC502-314C. Platinum (Pt). See option 13711.
SC502-314C/0.2mm. Platinum (Pt) 0.2 mm. See option 13711.
TK8893. Platinum (Pt) 0.3 mm. See option 13711.
TK8887. Platinum/palladium (Pt/Pd - 80:20) 0.3 mm.
SC502-314E: Silver (Ag).