spares-parts / RF Plasma Etchers / Plasma Reactors

Chamber O ring
Chamber O ring

51000073

Three are required

K1050X

5 days

Fuse Set - PT7160
Fuse Set - PT7160

PT7160 FUSEKIT

Contents: two of each of the four types

PT7160

1 week

Glass Cylinder
Glass Cylinder

G6788

Borosilicate glass

K1050X

1-2 weeks

Glass Window
Glass Window

G6786

Borosilicate glass

K1050X

1-2 weeks

Pirani Gauge
Pirani Gauge

50100010

TPR265 compact pirani gauge

K400X, K450X, K950X, K1050X

1 week

Quartz Chamber
Quartz Chamber

EK4222

Quartz

K1050X

4-6 weeks

Quartz Window
Quartz Window

A3090279

Quartz

K1050X

4-6 weeks

Service Kit - PT7160
Service Kit - PT7160

PT7160-90

Contents: gauze window, O rings, quartz window and fuses

PT7160

4-6 weeks

Silicon Door Gasket
Silicon Door Gasket

G6787

Gasket

K1050X

1-2 weeks

Window O ring for K1050X Plasma Barrel Reactor
Window O ring for K1050X Plasma Barrel Reactor

51000007

Two are required

K1050X

5 days