product / Sputter Coaters and SEM/TEM Carbon Coaters

Q150GB Turbo-Pumped Sputter Coater / Carbon Coater for Glove Box
Q150GB Turbo-Pumped Sputter Coater / Carbon Coater for Glove Box

Q150 GB

The Q150GB is a modular glove box version of the highly successful Q150T ES bench top turbomolecular-pumped coating system - suitable for SEM, TEM and many thin-film applications. The Q150GB comes as standard with sputtering and carbon rod evaporation inserts and a rotating specimen stage. Options include a metal evaporation insert, glow discharge, a film thickness monitor (FTM), aperture cleaning insert and special stages to suit a range of specimen types.

Q150R Rotary-Pumped Sputter Coater/Carbon Coater
Q150R Rotary-Pumped Sputter Coater/Carbon Coater

Q150 R

The Q150R is a compact rotary-pumped coating system suitable for SEM sputtering with noble metals - eg gold (Au), gold/palladium (Au/Pd) and platinum (Pt) - and for carbon coating SEM specimens for EDS and WDS. The Q150R is available in three formats: \n \n *Q150R S - a compact rotary-pumped sputter coater, suitable for non-oxidising metals, such as gold (Au) and platinum (Pt)\n *Q150R E - a compact rotary-pumped carbon fibre coater for SEM applications\n *Q150R ES - a compact rotary-pumped combined sputter coater and SEM carbon coater.\n \n Visit our Product Information section for full details.

Q300R T Triple Target, Large Chamber, Rotary-Pumped Sputter Coater
Q300R T Triple Target, Large Chamber, Rotary-Pumped Sputter Coater

Q300R T

The Q300R T is a large chamber, rotary-pumped coating system ideally suited for sputtering a single large diameter specimen up to 8"/200mm (eg a wafer), or multiple smaller specimens over a similar diameter. The Q300R T is fitted with three individual sputtering heads to ensure even deposition on a range of specimen types. The system is designed to sputter non-oxidising (noble) metals - eg gold (Au), gold/palladium (Au/Pd) and platinum (Pt) - and is fitted with three individual sputtering heads to ensure even sputtering deposition over a large diameter. Gold (Au) targets are fitted as standard.\n \n NB: For sputtering non-oxidising and oxidising metals, see the Q300T T Triple Target, Large Chamber, Turbo-Pumped Sputter Coater. For sequential sputtering of two different oxidising or non-oxidising metals, see the Q300T D Dual Target Sequential Sputtering System.\n \n Visit our Product Information section for full details.

Q300T D Dual Target Sequential Sputtering System
Q300T D Dual Target Sequential Sputtering System

Q300T D

The Q300T D is a fully automatic, free-standing sputter coater ideally suited for thin film applications and for conductive coating of scanning electron microscopy (SEM) specimens. \n \n At the operational heart of the Q300T D is a large chamber fitted with two independent sputtering heads. This dual-head configuration allows two different metals to be sequentially sputtered without the need to 'break' vacuum. A dual channel film thickness monitor option is available. \n \n The system is designed to sputter a wide range of oxidising metals, eg chromium (Cr) and aluminium (Al), and non-oxidising (noble) metals, eg gold (Au) and platinum (Pt). \n \n The Q300T D sputter coater has a 300mm x 127mm work chamber and a specimen stage that accepts substrates of 2-4" wafer sizes as standard and 6" wafers with an optional stage accessory. An optional extended height glass chamber is available to enable coating of larger specimens.\n \n Visit our Product Information section for full details.

Q300T T Triple Target, Large Chamber, Turbo-Pumped Sputter Coater
Q300T T Triple Target, Large Chamber, Turbo-Pumped Sputter Coater

Q300T T

The Q300T T is a large chamber, turbomolecular-pumped coating system ideally suited for sputtering a single large diameter specimen up to 8"/200mm (eg a wafer) or multiple smaller specimens over a similar diameter. \n \n The Q300T T is fitted with three individual sputtering heads to ensure even deposition on a range of specimen types. The system is designed to sputter both oxidising metals, eg chromium (Cr) and aluminium (Al), and non-oxidising (noble) metals, eg gold (Au), gold/palladium (Au/Pd) and platinum (Pt). The Q300T T is fitted with three individual sputtering heads to ensure even sputtering deposition over a large diameter. Chromium (Cr) targets are fitted as standard. \n \n NB: For sputtering non-oxidising metals only, see the Q300R T Triple Target, Large Chamber, Rotary-Pumped Sputter Coater. For sequential sputtering of two different oxidising or non-oxidising metals, see the Q300T D Dual Target Sequential Sputtering System.\n \n Visit our Product Information section for full details.

SC7620 'Mini' Sputter Coater/Glow Discharge System
SC7620 'Mini' Sputter Coater/Glow Discharge System

SC7620

The SC7620 is a compact, low cost SEM sputter coater. When combined with the optional carbon attachment SC7620-CF it makes the ideal low-cost SEM sputtering and carbon coating system package. Additionally, the SC7620 is fitted as standard with a glow discharge function, making it ideal for the hydrophilisation, or wetting, of carbon-coated TEM grids and other surface modifications. A panel-mounted switch allows the system to be easily changed between sputter coating and glow discharge modes. The SC7620 is robust, easy to operate and is backed up with a three-year warranty.\n \n The SC7620 is primarily designed for coating specimens prior to examination in tungsten filament SEMs. For extra fine grain coating required for most FE-SEM applications, high vacuum coating is required - see the Q150T, or for larger specimens see the Q300T T.\n \n Visit our Product Information section for full details.

115V Fuse Pack
115V Fuse Pack

AL117179-1

Two each of 15A Slo-Blo and T2A ceramic fuses

K575X, K675X

5 days

115V Fuse Pack
115V Fuse Pack

AL107038-2

Two each of 15A fuse and T5A ceramic

K500X, K550X, K650X

5 days

230V Fuse Pack
230V Fuse Pack

AL107037-1

Two each of T10A and T3. 15A ceramic fuses

K500X, K550X, K650X

5 days

230V Fuse Pack
230V Fuse Pack

AL117178-1

Two each of T10A and T1A ceramic fuses

K575X, K675X

5 days

Complete Fuse Set
Complete Fuse Set

SC7640-FUSE KIT

Contents: two of all type T: 630mA, 1A, 2A, 3.5A, 10A, 15A

SC7640, SC7680

5 days

Complete Fuse Set
Complete Fuse Set

SC7620/FUSEKIT

Contents: two of all Type T; 630mA 20mm, 2A , 3A, 10A , 15A

SC7620

5 days

Complete O ring and L gasket Kit
Complete O ring and L gasket Kit

SC7680-OKIT

Contents: seven O rings and two L gaskets

SC7680

1-2 weeks

Complete O ring and L gasket Kit
Complete O ring and L gasket Kit

SC7640 SEALS KIT

Contents: 15 x O rings and two L gaskets

SC7640, SC7610, CC7650

1-2 weeks

Complete O ring And L gasket Kit
Complete O ring And L gasket Kit

E5000-940

Contents: 10 O rings and two L gaskets

E5000, E5400

2 weeks

Meter Current - 50mA
Meter Current - 50mA

407135050

Front panel current meter

SC7680, SC7640, SC7620, SC7610, E5000, E5400

4-6 weeks

Glass Cylinder - 110mm OD, 100mm H - SC7620
Glass Cylinder - 110mm OD, 100mm H - SC7620

372211005

Taller cylinder for carbon accessory as used on SC7620 Sputter Coater

SC7620, CA762F

5 days

Pirani Gauge Head - 500mm
Pirani Gauge Head - 500mm

500020100

Low vacuum sensor

E6300, E6700, E6100, E5000, E5200 Auto, E5400

4-6 weeks

Quartz Crystals -set of three
Quartz Crystals -set of three

FT553

Set of three spare 5MHz gold (Au)/quartz crystals for Film Thickness Monitor use

LT7690 FTM

Normally in stock

Glass Cylinder - 250mm OD, 140mm H
Glass Cylinder - 250mm OD, 140mm H

372225010

Glass cylinder - borosilicate glass 3.3

SC7680

5 days

Spares Kit - two years
Spares Kit - two years

SC7680-2YRS SPARES

Contents: 1m vacuum hose, 2m EPDM tubing, fuse set, O rings set, needle valve assembly, gold/palladium (Au/Pd) target and glass cylinder

SC7680

2 weeks

Stage Motor - 12V 60RPM
Stage Motor - 12V 60RPM

408701240

Replacement stage motor for 'rota-cota' stage

Rota Cota RC7606

1-2 weeks

Leak Valve Assembly
Leak Valve Assembly

550007000

Front panel leak valve

SC7620, SC7640, SC7610, SC502, SC510, SC515, E5100, E5200, E5200 Auto

1-2 weeks

Pirani Gauge Head (with DIN plug)
Pirani Gauge Head (with DIN plug)

500020110

Low vacuum sensor

SC7640, CC7650

4-6 weeks

Transformer - 75VA LT4704
Transformer - 75VA LT4704

416151140

LV transformer for SC7640 Sputter Coater

SC7640

1-2 weeks

Service Kit - SC7640
Service Kit - SC7640

SC7640-SERVICE KIT

Contents: hoses, insulators, pirani head, leak valve assembly, set of O rings, L gasket, fuse set, HT cable assembly

SC7640

4-6 weeks

Rotary Leadthrough O ring Kit
Rotary Leadthrough O ring Kit

AL310312-1

Set of four O rings for K675X rotary specimen stage

K675X

5 days

Shutter Leadthrough O ring Kit
Shutter Leadthrough O ring Kit

AL310311-1

Set of four O rings for K675X rotary shutter assembly

K675X

5 days

PTFE Insulator Rings
PTFE Insulator Rings

G6307

Sputtering head insulators for the K675X, supplied as a set of three

K675X

5 days

Glass Cylinder
Glass Cylinder

G6303

300mm diameter x 200mm H glass cylinder

K675X

1-2 weeks

Flat Gaskets - pair
Flat Gaskets - pair

G6302

Flat viton sealing gaskets to suit 300mm glass cylinder (K675X)

K675X

1-2 weeks

L gaskets - pair
L gaskets - pair

G6263

L gaskets to suit 9" glass cylinder

K650X, K975X

1-2 weeks

Glass Cylinder 9"
Glass Cylinder 9"

G6262

9" OD, 5" H

K650X

1-2 weeks

Glass Cylinder (extended height)
Glass Cylinder (extended height)

G6304

6" OD, 214mm H (extended height)

K575X (when used with K250)

1-2 weeks

L gaskets to suit 6" Cylinder
L gaskets to suit 6" Cylinder

G6261

Pair of L gaskets to suit the 6" glass cylinder

K450X, K550X, K575X, K950X

5 days

Glass Cylinder 6"
Glass Cylinder 6"

G6260

6" OD, 127mm H - glass cyclinder

K450X, K550X, K575X, K950X

5 days

Pirani Timer HT PCB - SC7620
Pirani Timer HT PCB - SC7620

PCP01-138

Main logic, Pirani and HT board

SC7620

4-6 weeks

Front Panel PCB - SC7620
Front Panel PCB - SC7620

PCP01-137

Printed circuit board behind front panel switches

SC7620

4-6 weeks

Switch Panel PCB - SC7640
Switch Panel PCB - SC7640

PCP01-110

Printed circuit board behind front panel switches

SC7640, SC7680

4-6 weeks

Main Control PCB - SC7640
Main Control PCB - SC7640

PCP-01-001

Main logic and control printed circuit board

SC7640, SC7680

4-6 weeks

L gasket 6.25" Nitrile - set of two gaskets
L gasket 6.25" Nitrile - set of two gaskets

354660620-2

Set of two 6.25" L gasket nitrile. Used on current: SC7640, CC7650, CA076F, CA076R, Obsolete SC500/500A, E5200 Auto, E5000/E5400

E5000, E5200 Auto, E5400, SC500, SC500A

Normally in stock

Transformer - 2800V 40mA
Transformer - 2800V 40mA

416362820

HV Transformer

Obsolete E5000, E5400, SC520

Normally in stock

Transformer Pirani
Transformer Pirani

416131222

12VA - two 12V

E5000, E5400

2 weeks

Teflon Sputter Target Ring Screws
Teflon Sputter Target Ring Screws

250104410-4

For Obsolete coater range. Set of four precision-made PTFE screws that retain target assembly

E5100, SC515, E5100, E5000, E5400

2 weeks

Glass Cylinder
Glass Cylinder

372216500S

For Obsolete Polaron/Bio-Rad SC510, SC515 and E5100 coaters. Please advise the exact sputter coater collar dimension when ordering (NB: the figure is engraved on the inside rim of the collar). Please contact us for a quote for this special item

SC510, SC515, E5100

2 weeks

O ring Kit - E5100
O ring Kit - E5100

551000000

Contents: 22 O rings. Used on Obsolete SC510, SC515, E5100, E5150

SC510, SC515, E5100

2 weeks

O ring Kit
O ring Kit

SC502-OKIT

Contents: 12 O rings and two L gaskets

SC502

1-2 weeks

Glass Chamber
Glass Chamber

2050200110

Borosilicate glass 3.3

SC502

1-2 weeks

Standard Glass Cylinder - SC7620
Standard Glass Cylinder - SC7620

CYL-002

Glass cylinder - borosilicate glass

SC7620

Normally in stock

Sputter Target Insulator
Sputter Target Insulator

A3100008

One is required for the K550X, three are required for the K650X

K500X, K550X, K650X

1 week

Complete O ring Set - SC7620
Complete O ring Set - SC7620

SC7620 OKIT

Contents: eight O rings for SC7620 Sputter Coater

SC7620

1-2 weeks

O ring Kit
O ring Kit

AL407114-1-a

Rotary leadthrough O ring kit

K575X

5 days

Turbomolecular Pump with controller
Turbomolecular Pump with controller

10142

Edwards EXT75DX turbomolecular pump and controller. Pump supplied is EXT75DX and can be used as direct exchange for EXT70H

K575X, K675X, K950X, K975X, K1250X, PP2000, PP2000T, PP3000T, Q150T series, Q300 series

1-2 weeks

Transformer 2800 LT286
Transformer 2800 LT286

416362821

HV Transformer

SC7640, SC7620

4-6 weeks

Pirani Gauge
Pirani Gauge

50100012

APGX active linear pirani gauge

K500X, K550X, K575X, K675X, K650X, K1250X

1 week

Sputter Supply PCB
Sputter Supply PCB

AL310185-6

PCB Assembly

K575X, K675X

4-6 weeks

Vent Valve - 5mm
Vent Valve - 5mm

356170500

Front panel vent valve

SC7620, CC7650, E6300, E5000, E5400, SC502

1 week

L gaskets - pair
L gaskets - pair

G6261-a

6" L gaskets to suit G6260 glass cylinder

K400X, K450X, K500X, K550X, K575X, K950X

1 week

Control PCB
Control PCB

AL310181-3

Control PCB assembly

K575X, K675X

4-6 weeks

Spares Kit - two years
Spares Kit - two years

SC7640-2YRS SPARES

Contents: vacuum hose, EPDM tubing, fuse set, O rings, leak valve assembly, gold/palladium (Au/Pd) target and glass cylinder

SC7640

4 weeks

SC7620 Spares Kit - two years
SC7620 Spares Kit - two years

SC7620-2YRS SPARES

Contents: vacuum hose, EPDM tubing, fuse set, O rings, needle valve assembly, gold/palladium (Au/Pd) target and glass cylinder

SC7620

3 weeks

Service Kit for overhaul - SC7620
Service Kit for overhaul - SC7620

SC7620-SERVKIT

Contents: hoses, insulator, leak valve assembly, set of O rings, fuse set

SC7620

1-2 weeks

Pirani Meter - mb/Pa
Pirani Meter - mb/Pa

407121050

Front panel meter - for chamber pressure measurement

SC7620, SC7640, CC7650, SC7610, E5000, E5400

4-6 weeks

Diode Board Assembly
Diode Board Assembly

650002400

HV Rectifier PCB

SC7640, SC7610

4-6 weeks

Sirai Valve
Sirai Valve

60100007

Connections extra if required

K400X, K450X, K500X, K550X, K650X, K575X, K675X, K950X, K975X, K1250X

1 week

Insulator Sheet
Insulator Sheet

A4110056

One is required for K575X, three are required for K675X

K575X, K675X

5 days

Rotary Leadthrough O ring Kit
Rotary Leadthrough O ring Kit

AL407114-1

Rotary specimen stage leadthrough O rings - two needed

K450X, K550X, K650X, K950X

5 days

Peltier Drive PCB
Peltier Drive PCB

AL310182-2.1

PCB assembly

K575X, K675X

4-6 weeks

Control PCB
Control PCB

AL107002-5

PCB assembly

K500X, K550X, K650X

4-6 weeks

Pump Drive Module
Pump Drive Module

50000036

EXDC80 24V DC. Drive module for Edwards turbomolecular pump

K575X, K675X, K950X, K975X, K1250X

1-2 weeks

PTFE Insulator Ring
PTFE Insulator Ring

G6306

One is required for K575X

K575X

5 days

L gaskets to suit 9" Glass Cylinder
L gaskets to suit 9" Glass Cylinder

G6263-a

Pair of L gaskets to suit the 9" glass cylinder

K650X

5 days

Fine Metering Valve
Fine Metering Valve

60100017

Gas bleed control valve

K500X, K550X, K575X, K650X, K675X, K975X, K1250X

5 days

Standard HT Supply PCB
Standard HT Supply PCB

AL001211-4

Standard HT supply PCB assembly

K500X, K550X, K650X

4-6 weeks

Insulator Assembly
Insulator Assembly

AL117177-1

One is required for the K575X and three are required for the K675X

K575X, K675X

1 week