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Edwards “Fomblinised“ RV3 Rotary Pump



Key features

  • Recommended for use with the Quorum K1050X RF Plasma Reactor
  • High reliability – generous lubrication of moving parts
  • Quiet running with intrusive frequencies minimised

  • Product Description
  • Images
  • Ordering information

The Edwards Fomblinised RV3 rotary pump is supplied as standard with the K1050X RF Plasma Etcher/Asher/Cleaner and use is essential if oxygen is to be used as a process gas.

The pump has been especially modified and cleaned to accept Fomblin® oil, which is compatible with oxygen gas in normal operation.

EK3176. Edwards Fomblinised RV3 rotary pump.

E5005Z. Fomblin® oil, 1 Kg (spare).


UNITED KINGDOM

Headquarters

Judges House, Lewes Road,
Laughton, East Sussex.
BN8 6BN

+44 1323 810981

www.quorumtech.com

sales@quorumtech.com

UNITED KINGDOM

Working Hours

8.30 – 5.00 pm Mon – Thu
8.30 – 1.00 pm Fri
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