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    Edwards “Fomblinised“ RV3 Rotary Pump



    Key features

    • Recommended for use with the Quorum K1050X RF Plasma Reactor
    • High reliability – generous lubrication of moving parts
    • Quiet running with intrusive frequencies minimised

    • Product Description
    • Images
    • Ordering information

    The Edwards Fomblinised RV3 rotary pump is supplied as standard with the K1050X RF Plasma Etcher/Asher/Cleaner and use is essential if oxygen is to be used as a process gas.

    The pump has been especially modified and cleaned to accept Fomblin® oil, which is compatible with oxygen gas in normal operation.

    EK3176. Edwards Fomblinised RV3 rotary pump.

    E5005Z. Fomblin® oil, 1 Kg (spare).


    UNITED KINGDOM

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    Judges House, Lewes Road,
    Laughton, East Sussex.
    BN8 6BN

    +44 1323 810981

    www.quorumtech.com

    sales@quorumtech.com

    UNITED KINGDOM

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