To ensure peace of mind once you have chosen to purchase your product from Quorum, we offer a range of consumables and spares you can order direct from us.
Our consumable products are listed below. If you need to purchase spares please contact our sales team on [email protected].
Alternatively, to discuss what you might need for your product our expert service team can be reached directly via [email protected]
Quorum offers metal sputtering targets for our current Q Series (S and ES versions) and SC7620 sputter coaters, as well as for previous models manufactured with the brand names Emscope, Emitech, Polaron, Bio-Rad, Fisons Instruments, and Thermo VG. Please see the below list and email [email protected] with your requirements.
E7400-314A Target
Gold 0.2 mm
PP3010
E7400-314B Target
Gold/Palladium 0.2 mm
PP3010
E7400-31C Target
Platinum 0.2 mm
PP3010
E7400-314IR Target
Iridium 0.3 mm
PP3010
SC500-314A Target
Gold 60 mm x 0.1 mm thick
SC500 & SC500A
SC500-314B Target
Gold/Palladium (80/20%) 60 mm x 0.1 mm thick
SC500 & SC500A
SC500-314C Target
Platinum 60 mm x 0.1 thick
SC500 & SC500A
SC500-314D Target
Nickel 60 mm x 0.1 mm thick
SC500 & SC500A
SC500-314E Target
Silver 60 mm x 0.1 mm thick
SC500 & SC500A
SC500-314G Target
Palladium 60 mm x 0.1 mm thick
SC500 & SC500A
SC502-314A Target
Gold 57 mm x 0.1 mm
E5000, E5200, E5400, K575, K575X, Q150R+, Q150T+, Q300R+, Q300T+, SC7610 & SC7620
SC502-314B Target
Gold/Palladium (80/20%) 57 mm x 0.1 mm
E5000, E5200, E5400, K575, K575X, Q150R+, Q150T+, Q300R+, Q300T+, SC7610 & SC7620
SC502-314C Target
Platinum 57 mm x 0.1 mm
E5000, E5200, E5400, K575, K575X, Q150R+, Q150T+, Q300R+, Q300T+ & SC7610
SC502-314D Target
Nickel 57 mm x 0.1 mm
K575X, Q150T+ & Q300T+
SC502-314E Target
Silver 57 mm x 0.1 mm thick
E5000, E5200, E5400, K575, K575X, Q150R+, Q150T+, Q300R+, Q300T+, SC7610 & SC7620
SC502-314G Target
Palladium 57 mm x 0.1 mm thick
E5000, E5200, E5400, K575, K575X, Q150R+, Q150T+, Q300R+, Q300T+, SC7610 & SC7620
SC502-314H Target
Copper 57 mm x 0.1 mm thick
E5000, E5200, E5400, K575, K575X, Q150R+, Q150T+, Q300R+, Q300T+, SC7610 & SC7620
SC502-314A/0.2mm Target
Gold 57 mm x 0.2 mm thick
E5000, E5200, E5400, K575, K575X, Q150R+, Q150T+, Q300R+, Q300T+, SC7610 & SC7620
SC502-314B/0.2mm Target
Gold/Pallidium (80/20%) 57 mm x 0.2 mm thick
E5000, E5200, E5400, K575, K575X, Q150R+, Q150T+, Q300R+, Q300T+, SC7610 & SC7620
SC502-314C/0.2mm Target
Platinum 57 mm x 0.2 mm thick
E5000, E5200, E5400, K575, K575X, Q150R+, Q150T+, Q300R+, Q300T+
SC510-314A Target
Gold 0.1 mm thick
E5100,SC510, SC515, SC7640 & SC7680
SC510-314B Target
Gold/Palladium (80/20%) 60 mm x 0.1 mm thick
E5100,SC510, SC515, SC7640 & SC7680
SC510-314B/0.2mm Target
Gold/Palladium 0.2 mm thick
E5100,SC510, SC515, SC7640 & SC7680
SC510-314C Target
Platinum 0.1 mm thick
E5100,SC510, SC515, SC7640 & SC7680
SC510-314C/0.2mm Target
Platinum 0.2 mm thick
E5100,SC510, SC515, SC7640 & SC7680
SC510-314CU Target
Copper 0.1 mm thick
E5100,SC510, SC515, SC7640 & SC7680
SC510-314E Target
Silver 60 mm x 0.1 mm thick
E5100,SC510, SC515, SC7640 & SC7680
SC510-314G Target
Palladium 0.1 mm thick
E5100,SC510, SC515, SC7640 & SC7680
SC650-314A Target set
Gold 0.1 mm thick (set of 4)
SC650, SC650A
SC650-314B Target set
Gold/Palladium (80/20%) 0.1 mm thick (set of 4)
SC650, SC650A
SC650-314C Target set
Platinum 0.1 mm thick (set of 4)
SC650, SC650A
SC650-314D Target set
Nickel 0.1 mm thick (set of 4)
SC650, SC650A
SC650-314E Target set
Silver 0.1 mm thick (set of 4)
SC650, SC650A
TK8842 Target
Gold 60 mm x 0.1 mm thick
K500X, K550X, K650X
TK8843 Target
Gold/Palladium (80/20%) 60 mm x 0.1 mm thick
K500X, K550X, K650X
TK8844 Target
Platinum 0.1 mm thick
K500X, K550X, K650X
TK8845 Target
Chromium 57 mm x 0.5 mm thick
K575X, Q150T+, Q300T+
TK8846 Target
Tungsten 57 mm x 0.5 mm thick
K575X, Q150T+, Q300T+
TK8862 Target
Chromium 57 mm x 1.5 mm thick
K575X, Q150T+, Q300T+
TK8867 Target
Tungsten 57 mm x 0.2 mm thick
K575X, Q150T+, Q300T+
TK8869 Target
Carbon 57 mm x 1.5 mm thick
K575X, Q150T+, Q300T+
TK8873 Target
Silver 60 mm x 0.1 mm thick
K500X, K550X, K650X
TK8874 Target
Nickel 60 mm x 0.1 mm thick
K500X, K550X, K650X
TK8875 Target
Aluminium 57 mm x 1 mm thick
K575X, Q150T+, Q300T+
TK8878 Target
Platinum/Palladium 57 mm x 0.1 mm thick (80/20%)
E5000, E5200, E5400, K575, K575X, PS3, Q150R, Q150T+, Q300R+, Q300T+, SC500, SC7610
For a list of available targets please click here
Carbon rod and carbon fibre supplies are offered in a range of sizes and purities and typically used for evaporating carbon onto specimens being prepared for either x-ray microanalysis or transmission electron microscopy (TEM).
For a list of available Carbon Consumables please click here
Quorum offers a range of additional accessories for all our products, including Stages, chamber accessories and spares. Please email [email protected] to order
Q150 Stage Options for purchase
10067 50mm Stage Supplied as Standard
10458 4 inch Stage with offset gearbox
10358 Slide Stage
10357 Tilt Stage
10360 Rota Cota
10808 8 place Sample Stage
11867 8 place sample Stage with offset gearbox (for use with FTM)
11856 14 place Sample Stage
10787 4 inch wafer Stage
10756 Alternating Stage Gearbox
10810 6 inch wafer Stage
10884 Planetary wafer stage
10826 8 inch wafer Stage
Q300TD Stage Options for purchase
10787 4 inch wafer Stage
10994 6 inch wafer Stage includes stop assembly
10067 50mm Stage
10358 Slide Stage
10357 Tilt Stage
10360 Rota Cota
10808 8 place sample Stage
10856 14 place sample Stage
Q300TT Stage Options
10826 8 inch wafer Stage supplied as standard
10067 50mm Stage
10358 Slide Stage
10357 Tilt Stage
10360 Rota Cota
10808 8 place sample Stage
10787 4 inch wafer Stage
11856 14 place sample Stage
Many of our instruments require the addition of a suitable two-stage rotary vacuum pump (vane pump), either as a primary pump or to back a built-in turbomolecular pump.
We are pleased to offer the Pfeiffer DUO 6 two-stage pump, which has an excellent reputation for both reliability and performance, delivering high or low throughputs with a high ultimate vacuum.
Depending upon the application, we also offer dry pumping options, stand-alone rotary pump plus turbomolecular pump combinations, and a Fombilised rotary pump for use with the K1050X RF Plasma Reactor.
Many Quorum Technologies products require the addition of a suitable two-stage rotary vacuum, either a primary pump (e.g. for low vacuum sputter coaters, such as the Q150R) or to ‘back’ and rough-pump instruments with built-in turbomolecular pumps, such as the Q150T sputter coater and K975X vacuum evaporator.
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The Edwards nXDS6i is a lubricant-free scroll pump designed for primary pumping applications where standard, oil-based rotary pumps need to be avoided. For lubricant-free applications where a greater pumping capacity is needed the nXDS10i is available.
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The VacuuBrand MD 1 diaphragm pump is designed for oil-free evacuation and pumping of non-corrosive gases down to 1.5 mbar ultimate vacuum. The three-stage design provides outstanding pumping speed even close to the ultimate vacuum, especially when compared with similarly rated two-stage diaphragm pumps.
Recommended for oil-free backing of Quorum turbo pumped coaters such as the Q150T and Q300TT and K975X vacuum evaporator.
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The Edwards Fomblinised RV3 rotary pump is supplied as standard with the K1050X RF Plasma Etcher/Asher/Cleaner and is essential if oxygen is to be used as a process gas. The pump has been specially modified and cleaned to accept Fomblin® oil, which is compatible with oxygen gas in normal operation.
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