The K850 WM is a compact, bench-top instrument designed to critical point dry a complete 6″/150 mm wafer. A convenient wafer holder allows rapid transfer and ensures that pre-drying does not occur.
K850 WM Large Chamber Critical Point Dryer
The K850WM has built-in heating and water cooling using the E4860 Recirculating Heater/Chiller. This combination will give temperature control of +5°C cooling and +35°C during heating. This ensures the critical point is accurately obtained and avoids excess pressures and temperatures or the need to rely on pressure relief valves to control pressure during the heating cycle.
The K850WM has a vertical chamber which allows top-loading of the specimen (e.g. single wafer). A viewing port in the top plate allows observation of the chamber and wafer during the critical point drying process.
The exchange mechanism is simple to use and ensures the specimen remains under liquid during loading.
The E4860 Recirculating Heater/Chiller and EK3102/EK3102-110V carbon dioxide conditioning system must be ordered with the K850WM. For details see: Ordering Information.
Specimen handling
6″/100 mm or 8″/150 mm diameter wafers are held in a PTFE holding tray. The tray including wafer is immersed in acetone in order to remove all moisture from the specimen. After dehydration, the wafer and holder are transferred into the pre-cooled specimen chamber using the wafer transfer device. On completion of the critical point drying process, the wafer is removed from the chamber using the transfer device prior to further processing.
This product is for Research Use Only.
K850WM. Large Chamber Critical Point Dryer – for 4″ or 6″ wafers
Requirements
E4860. Recirculating heater/chiller (for cooling chamber).
EK3102. Carbon dioxide cylinder conditioning system.
EK3102-110V. Carbon dioxide cylinder conditioning system (110V).
Options and Accessories
AL800019-1. Standard 12 specimen holder with 12 individual specimen wells (each 8 mm Ø x 8 mm H).
EK4140. TEM grid holder.
EK4135. Glass microscope slide holder.
EK4130. Holder for bulk specimens (a single large container).
CPD800A. Porous specimen pots.
