Sputter Coaters and Carbon Coaters

Sputter coaters and carbon coaters

CC7650 SEM Carbon Coater

CC7650 SEM Carbon Coater

The vacuum chamber is 155 mm/6" ID and uses either carbon fibre or carbon rod evaporation. Discontinued in 2009. For carbon supplies, see: carbon rod and carbon fibre.

Modern equivalent:

E5000 Sputter Coater

E5000 Sputter Coater

This is the original "Polaron" sputter coater. Launched in the early 1970s and discontinued circa 1987, the E5000 was the first commercially successful SEM sputter coater. Please note that E5000 models pre-date the introduction of the 'cool' (magnetron) sputtering head and therefore tend to generate more heat on the surface of specimens compared to modern instruments. Uses 57 mm diameter disc targets - still available from Quorum. See: E5000 sputtering targets.

Modern equivalent:

E5100 'Cool' Sputter Coater

E5100 'Cool' Sputter Coater

Pioneering annular head sputter coater developed by Polaron. The first SEM coater with a 'cool' magnetic deflection head. Replaced by SC510 circa 1988. The glass chamber is approximately 155 mm/6" ID and uses an 82 mm OD annular target - available from Quorum. See: E5100 sputtering targets.

Modern equivalent:

E5150 FTM-controlled 'Cool' Sputter Coater

E5150 FTM-controlled 'Cool' Sputter Coater

FTM-controlled version of the E5100. Discontinued circa 1988. For replacement targets see: E5150 sputtering targets.

Modern equivalent:

E5175 Large Chamber 'Cool' Sputter Coater

E5175 Large Chamber 'Cool' Sputter Coater

Large chamber (200 mm/8" ID) version of the E5100. Uses 117 mm OD annular targets. Discontinued circa 1988. For replacement sputtering targets see: E5175 sputtering targets.

Modern equivalent:

E5200 Automatic Sputter Coater

E5200 Automatic Sputter Coater

The first automatic sputter coater from Polaron. Thec hamber is 155 mm/6" ID. Uses 57 mm diameter disc targets. Discontinued circa 1988. Targets available from Quorum. See: E5200 sputtering targets.

Modern equivalent:

E5400 High Resolution Sputter Coater

E5400 High Resolution Sputter Coater

Chamber is 155 mm/6" ID. Uses 57 mm diameter disc targets. Discontinued circa 1988. Targets available from Quorum. See: E5400 sputtering targets.

Modern equivalent:

E5600 SEM Carbon Coater

E5600 SEM Carbon Coater

SEM carbon coater. Chamber is 155 mm/6" ID. Available with carbon fibre or carbon rod heads. Discontinued circa 1988. For carbon supplies see: carbon rod and carbon fibre.

Modern equivalent:

E5800 Plasma Enhanced AC Sputter Coater

E5800 Plasma Enhanced AC Sputter Coater

(An early Polaron sputter coater. (Shown with E6900 high-vacuum base). Targets available from Quorum (please confirm if 57 mm disc or 82 mm annular style). For sputtering target details see: this link.

Modern equivalent:

E6200 Carbon Coater

E6200 Carbon Coater

Turbo-pumped carbon coater. Designed for TEM carbon coating applications. Discontinued in 1996. For carbon supplies see: carbon rod and carbon fibre.

Modern equivalent:

K400X and K450X SEM Carbon Coaters

K400X and K450X SEM Carbon Coaters

The K450X Rotary-Pumped Carbon Coater was primarily designed for scanning electron microscopy (SEM) specimen coating applications (eg EDS and WDS). With fully automatic control and an automatically operated source shutter, the system protected specimens during carbon out-gassing. The K400X Semi-automatic Carbon Coater was a semi-automatic version of the K450X with manual control of the shutter operation, and also fitted with a static specimen stage. Discontinued in 2010. For carbon supplies, see: carbon rod and carbon fibre.

Modern equivalent:

K500X and K550X Sputter Coaters

K500X and K550X Sputter Coaters

The K500X and K550X were digitally-controlled sputter coaters, ideally suited for SEM and other coating applications. Designed for sputtering non-oxidising metals - gold (Au) fitted as standard. Discontinued in 2010. For details of replacement targets see: K500X/K550X sputtering targets.

Modern equivalent:

K575X Turbo-Pumped Chromium Sputter Coater

K575X Turbo-Pumped Chromium Sputter Coater

Compact, turbomolecular-pumped sputter coater optimised to deposit fine metal coatings for SEM, FEG-SEM and thin film applications. Discontinued in 2010. For replacement targets see: K575X/K575 sputtering targets.

Modern equivalent:

K575XD Turbo-Pumped Dual Head Sputter Coater

K575XD Turbo-Pumped Dual Head Sputter Coater

The K575XD was a compact, dual head turbomolecular-pumped sputter coater optimised to deposit fine metal coatings for SEM, FEG-SEM and thin film applications - allowing sequential sputtering of two metals without the need to break vacuum. Discontinued in 2011.  For replacement targets see: K575XD sputtering targets.

Modern equivalent:

K650X Large Chamber Sputter Coater with Triple Target Head

K650X Large Chamber Sputter Coater with Triple Target Head

The K650X was a digitally-controlled, large chamber sputter coater, ideally suited for SEM and other metal coating applications. Fitted with three individual sputtering heads and a rotating specimen stag, it was rotary-pumped and suitable for non-oxidising metals. Discontinued in 2011. For replacement targets see: K650X sputtering targets.

Modern equivalent:

K675X and K675XD High Resolution Large Chamber Sputter Coaters

K675X and K675XD High Resolution Large Chamber Sputter Coaters

The K675X was a large chamber (300 mm) fully-automatic, turbo-pumped sputter coater that allowed complete 200 mm/8"  wafers to be coated with oxidising and non-oxidising metals. The K675XD version also had two independently controlled sputtering heads. Discontinued in 2011. For replacement targets see: K675X sputtering targets.

Modern equivalent:

PS3 Sputter Coater

PS3 Sputter Coater

A small chamber version of the E5000. Discontinued circa 1988. Uses 57 mm diameter disc targets - still available from Quorum. See: PS3 sputtering targets.

Modern equivalent:

SC502 'Mini' Sputter Coater

SC502 'Mini' Sputter Coater

Chamber is 100 mm/4" ID. Uses 57 mm diameter disc targets. Discontinued circa 1993. Targets available from Quorum. See: SC502 sputtering targets.

Modern equivalent:

SC510 'Cool' Sputter Coater

SC510 'Cool' Sputter Coater

(See: middle of front row). The glass chamber is approximately 155 mm/6" ID and uses an 82 mm OD annular target - available from Quorum. See: SC510 sputtering targets.

Modern equivalent:

SC650 and SC650A Large Chamber Sputter Coater

SC7610 Sputter Coater

SC7610 Sputter Coater

Chamber is 150 mm/6" ID. Uses 57 mm diameter disc targets. Discontinued circa 1997 and replaced by SC7620. Targets available from Quorum. See: SC7610 sputtering targets.

Modern equivalent:

SC7640 'Cool' Sputter Coater

SC7640 'Cool' Sputter Coater

The vacuum chamber is 155 mm/6" ID and uses an 82 mm OD annular target. Discontinued in 2009. For sputtering targets please contact Quorum. For target details see: SC7640 sputtering targets.

Modern equivalent:

TB500 SEM Carbon Coater

TB500 SEM Carbon Coater

Originally manufactured by Emscope, then by Bio-Rad and finally by Thermo VG. The TB500 was also manufactured in an automatic format (TB500A). For carbon supplies, see: carbon rod and carbon fibre.

Modern equivalent: