To ensure peace of mind once you have chosen to purchase your product from Quorum, we offer a range of consumables and spares you can order direct from us.
Our consumable products are listed below. If you need to purchase spares please contact our sales team on [email protected].
Alternatively, to discuss what you might need for your product our expert service team can be reached directly via [email protected]
Quorum offers metal sputtering targets for our current Q Series (S and ES versions) and SC7620 sputter coaters, as well as for previous models manufactured with the brand names Emscope, Emitech, Polaron, Bio-Rad, Fisons Instruments, and Thermo VG. Please see the below list and email [email protected] with your requirements.
E7400-314A Target – Gold 0.2mm PP3010
E7400-314B Target – Gold/Palladium 0.2mm PP3010
E7400-31C Target – Platinum 0.2mm PP3010
E7400-314IR Target – Iridium 0.3mm PP3010
SC500-314A Target – Gold 60mm x 0.1mm thick SC500 & SC500A
SC500-314B Target – Gold/Palladium (80/20%) 60mm x 0.1mm thick SC500 & SC500A
SC500-314C Target – Platinum 60mm x 0.1 thick SC500 & SC500A
SC500-314D Target – Nickel 60mm x 0.1mm thick SC500 & SC500A
SC500-314E Target – Silver 60mm x 0.1mm thick SC500 & SC500A
SC500-314G Target – Palladium 60mm x 0.1mm thick SC500 & SC500A
SC502-314A Target – Gold 57mm x 0.1mm E5000, E5200, E5400, K575, K575X, Q150R+, Q150T+, Q300R+, Q300T+, SC7610 & SC7620
SC502-314B Target – Gold/Palladium (80/20%) 57mm x 0.1mm E5000, E5200, E5400, K575, K575X, Q150R+, Q150T+, Q300R+, Q300T+, SC7610 & SC7620
SC502-314C Target – Platinum 57mm x 0.1mm E5000, E5200, E5400, K575, K575X, Q150R+, Q150T+, Q300R+, Q300T+ & SC7610
SC502-314D Target – Nickel 57mm x 0.1mm K575X, Q150T+ & Q300T+
SC502-314E Target – Silver 57mm x 0.1mm thick E5000, E5200, E5400, K575, K575X, Q150R+, Q150T+, Q300R+, Q300T+, SC7610 & SC7620
SC502-314G Target – Palladium 57mm x 0.1mm thick E5000, E5200, E5400, K575, K575X, Q150R+, Q150T+, Q300R+, Q300T+, SC7610 & SC7620
SC502-314H Target – Copper 57mm x 0.1mm thick E5000, E5200, E5400, K575, K575X, Q150R+, Q150T+, Q300R+, Q300T+, SC7610 & SC7620
SC502-314A/0.2mm Target – Gold 57mm x 0.2mm thick E5000, E5200, E5400, K575, K575X, Q150R+, Q150T+, Q300R+, Q300T+, SC7610 & SC7620
SC502-314B/0.2mm Target – Gold/Pallidium (80/20%) 57mm x 0.2mm thick E5000, E5200, E5400, K575, K575X, Q150R+, Q150T+, Q300R+, Q300T+, SC7610 & SC7620
SC502-314C/0.2mm Target – Platinum 57mm x 0.2mm thick E5000, E5200, E5400, K575, K575X, Q150R+, Q150T+, Q300R+, Q300T+
SC510-314A Target – Gold 0.1mm thick E5100,SC510, SC515, SC7640 & SC7680
SC510-314A/0.2mm Target – Gold 0.2mm thick E5100,SC510, SC515, SC7640 & SC7680
SC510-314B Target – Gold/Palladium (80/20%) 60mm x 0.1mm thick E5100,SC510, SC515, SC7640 & SC7680
SC510-314B/0.2mm Target – Gold/Palladium 0.2mm thick E5100,SC510, SC515, SC7640 & SC7680
SC510-314C Target – Platinum 0.1mm thick E5100,SC510, SC515, SC7640 & SC7680
SC510-314C/0.2mm Target – Platinum 0.2mm thick E5100,SC510, SC515, SC7640 & SC7680
SC510-314CU Target – Copper 0.1mm thick E5100,SC510, SC515, SC7640 & SC7680
SC510-314E Target – Silver 60mm x 0.1mm thick E5100,SC510, SC515, SC7640 & SC7680
SC510-314G Target – Palladium 0.1mm thick E5100,SC510, SC515, SC7640 & SC7680
SC650-314A Target set – Gold 0.1mm thick (set of 4) SC650, SC650A
SC650-314B Target set – Gold/Palladium (80/20%) 0.1mm thick (set of 4) SC650, SC650A
SC650-314C Target set – Platinum 0.1mm thick (set of 4) SC650, SC650A
SC650-314D Target set – Nickel 0.1mm thick (set of 4) SC650, SC650A
SC650-314E Target set – Silver 0.1mm thick (set of 4) SC650, SC650A
TK8842 Target – Gold 60mm x 0.1mm thick K500X, K550X, K650X
TK8843 Target – Gold/Palladium (80/20%) 60mm x 0.1mm thick K500X, K550X, K650X
TK8844 Target – Platinum 0.1mm thick K500X, K550X, K650X
TK8845 Target – Chromium 57mm x 0.3mm thick K575X, Q150T+, Q300T+
TK8846 Target – Tungsten 57mm x 0.5mm thick K575X, Q150T+, Q300T+
TK8862 Target – Chromium 57mm x 1.5mm thick K575X, Q150T+, Q300T+
TK8867 Target – Tungsten 57mm x 0.2mm thick K575X, Q150T+, Q300T+
TK8869 Target – Carbon 57mm x 1.5mm thick K575X, Q150T+, Q300T+
TK8873 Target – Silver 60mm x 0.1mm thick K500X, K550X, K650X
TK8874 Target – Nickel 60mm x 0.1mm thick K500X, K550X, K650X
TK8875 Target – Aluminium 57mm x 1mm thick K575X, Q150T+, Q300T+
TK8878 Target – Platinum/Palladium 57mm x 01.mm thick (80/20%) E5000, E5200, E5400, K575, K575X, PS3, Q150R, Q150T+, Q300R+, Q300T+, SC500, SC7610
TK8879 Target
Carbon rod and carbon fibre supplies are offered in a range of sizes and purities and typically used for evaporating carbon onto specimens being prepared for either x-ray microanalysis or transmission electron microscopy (TEM).
Quorum offers a range of additional accessories for all our products, including Stages, chamber accessories and spares. Please email [email protected] to order
Q150 Stage Options for purchase
10067 50mm Stage Supplied as Standard
10458 4 inch Stage with offset gearbox
10358 Slide Stage
10357 Tilt Stage
10360 Rota Cota
10808 8 place Sample Stage
11867 8 place sample Stage with offset gearbox (for use with FTM)
11856 14 place Sample Stage
10787 4 inch wafer Stage
10756 Alternating Stage Gearbox
10810 6 inch wafer Stage
10884 Planetary wafer stage
10826 8 inch wafer Stage
Q300TD Stage Options for purchase
10787 4 inch wafer Stage
10994 6 inch wafer Stage includes stop assembly
10067 50mm Stage
10358 Slide Stage
10357 Tilt Stage
10360 Rota Cota
10808 8 place sample Stage
10856 14 place sample Stage
Q300TT Stage Options
10826 8 inch wafer Stage supplied as standard
10067 50mm Stage
10358 Slide Stage
10357 Tilt Stage
10360 Rota Cota
10808 8 place sample Stage
10787 4 inch wafer Stage
11856 14 place sample Stage
Many of our instruments require the addition of a suitable two-stage rotary vacuum pump (vane pump), either as a primary pump or to back a built-in turbomolecular pump.
We are pleased to offer the Pfeiffer DUO 6 two-stage pump, which has an excellent reputation for both reliability and performance, delivering high or low throughputs with a high ultimate vacuum.
Depending upon the application, we also offer dry pumping options, stand-alone rotary pump plus turbomolecular pump combinations, and a Fombilised rotary pump for use with the K1050X RF Plasma Reactor.
Many Quorum Technologies products require the addition of a suitable two-stage rotary vacuum, either a primary pump (e.g. for low vacuum sputter coaters, such as the Q150R) or to ‘back’ and rough-pump instruments with built-in turbomolecular pumps, such as the Q150T sputter coater and K975X vacuum evaporator.
The Edwards nXDS6i is a lubricant-free scroll pump designed for primary pumping applications where standard, oil-based rotary pumps need to be avoided. For lubricant-free applications where a greater pumping capacity is needed the nXDS10i is available.
The VacuuBrand MD 1 diaphragm pump is designed for oil-free evacuation and pumping of non-corrosive gases down to 1.5 mbar ultimate vacuum. The three-stage design provides outstanding pumping speed even close to the ultimate vacuum, especially when compared with similarly rated two-stage diaphragm pumps.
Recommended for oil-free backing of Quorum turbo pumped coaters such as the Q150T and Q300TT and K975X vacuum evaporator.
The Edwards Fomblinised RV3 rotary pump is supplied as standard with the K1050X RF Plasma Etcher/Asher/Cleaner and is essential if oxygen is to be used as a process gas. The pump has been specially modified and cleaned to accept Fomblin® oil, which is compatible with oxygen gas in normal operation.
