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Rotary Vacuum and Dry Pumps

Many of our instruments require the addition of a suitable two-stage rotary vacuum pump (vane pump), either as a primary pump or to back a built-in turbomolecular pump.

We are pleased to offer the Pfeiffer DUO 6 two-stage pump, which has an excellent reputation for both reliability and performance, delivering high or low throughputs with high ultimate vacuum. 

Depending upon the application, we also offer dry pumping options, stand-alone rotary pump plus turbomolecular pump combinations and a Fombilised rotary pump for use with the K1050X RF Plasma Reactor.

If you would like to talk to a member of our sales team in the UK about any products, please call us on: +44(0)1323 810 981 or email:

Pfeiffer DUO 6 Rotary Vacuum Pump

Many Quorum Technologies products require the addition of a suitable two-stage rotary vacuum, either a primary pump (e.g. for low vacuum sputter coaters, such as the SC7620 and Q150R) or to ‘back’ and rough-pump instruments with built-in turbomolecular pumps, such as the Q150T sputter coater and K975X vacuum evaporator.

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Edwards nXDS Dry Scroll Pumps

The Edwards nXDS6i is a lubricant-free scroll pump designed for primary pumping applications where standard, oil-based rotary pumps need to be avoided. For lubricant-free applications where a greater pumping capacity is needed the nXDS10i is available.

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VacuuBrand MD1 Diaphragm Pump

The VacuuBrand MD 1 diaphragm pump is designed for oil-free evacuation and pumping of non-corrosive gases down to 1.5 mbar ultimate vacuum. The three-stage design provides outstanding pumping speed even close to the ultimate vacuum, especially when compared with similarly rated two-stage diaphragm pumps.

Recommended for oil-free backing of Quorum turbo pumped coaters such as the Q150T and Q300TT and K975X vacuum evaporator.

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Edwards "Fomblinised" RV3 Rotary Pump

The Edwards Fomblinised RV3 rotary pump is supplied as standard with the K1050X RF Plasma Etcher/Asher/Cleaner and is essential if oxygen is to be used as a process gas. The pump has been especially modified and cleaned to accept Fomblin® oil, which is compatible with oxygen gas in normal operation.

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