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Pfeiffer DUO 6 Rotary Vacuum Pump


Many Quorum Technologies products require the addition of a suitable two-stage rotary vacuum, either a primary pump (e.g. for direct pumping of low vacuum sputter coaters, such as the SC7620 and Q150R) or to ‘back’ and rough-pump instruments with built-in turbomolecular pumps, such as the Q150T sputter coater and K975X vacuum evaporator.



Key features

  • Intrusive frequencies minimised – low noise, low vibration
  • Dual mode – suitable for high throughput and high vacuum applications
  • Low mass (12.5 Kg) and compact size
  • Easy-to-use gas ballast
  • Oil return accessory port on pump housing allows easy installation of oil return device
  • Fast-acting inlet valve for system protection
  • Efficient high-pressure lubrication

  • Product Description
  • Images
  • Ordering information

Rotary pumps

Many Quorum Technologies vacuum systems require the addition of a suitable two-stage rotary vacuum pump, either a primary pump (e.g. for low vacuum sputter coaters, such as the SC7620 and Q150R) or to ‘back’ and rough-pump instruments with built-in turbomolecular pumps, such as the Q150T sputter coater and K975X vacuum evaporator.

For most Quorum vacuum instruments the Pfeiffer DUO 6, which has a pumping speed of 5 m3/h, is recommended. Please see individual product pages for exact requirements. When a DUO 6 is supplied by Quorum Technologies it will be fitted with an exhaust (oil mist) filter.

13034. Rotary pump. 5 m3/hr Pfeiffer DUO 6 two-stage rotary pump with oil mist filter.
O7803. Oil mist filter (spare).
13233. Rotary pump oil (1 L)
13235. Rotary pump oil (5 L).
20063 Scroll pump.  nXDS6i .
EK3170. Diaphragm pump. MD1 23 L/M.
EK3176. “Fombolinised” rotary pump. Edwards RV3 50 L/m.


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