Specifications

Instrument Dimensions

• 225 mm (Width) x 420 mm (Depth) x 325 mm (Height) (Total Height with coating head open 480 mm (H) 

Weight

• 8.7 kg

Pump

• You can purchase the instrument with or without a pump. Please note, the MiniQ GD specifications are based on use with a Pfeiffer Duo 6 pump. For more information regarding pump options please contact [email protected]

Stage Size 

• 50 mm Ø stage

Compliance

• The MiniQ GD complies to LVD, EMC, RoHS directives
• The MiniQ GD conforms to UKCA and European CE industry marks

Safety

• Vacuum interlocks remove power from deposition sources to prevent users being exposed to high voltage

Please contact our sales team at [email protected] for full pricing.

You can purchase the instrument with or without a pump. Please note, the MiniQ GD specifications are based on use with a Pfeiffer Duo 6 pump. For more information regarding pump options please contact [email protected]

Pfeiffer Duo 6 Pump

Part Number: 13034