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Sputter Coaters and SEM/ TEM Carbon Coaters

Sputter coating is the standard method for preparing non-conducting or poorly conducting specimens for observation in a scanning electron microscope (SEM). We offer low-cost, rotary-pumped systems for depositing non-oxidising metals - such as gold (Au) and platinum (Pt) - and turbomolecular-pumped models, suitable for both oxidising and non-oxidising metals, such as chromium (Cr). Large chamber systems are available for specimens up to 200 mm in diameter. Most sputter coater models can be configured carbon evaporation using easy-change carbon inserts. 


Need help selecting the correct coater for your needs?

Then our "Coater Selection Guide" can help you.

For further assistance please contact our UK sales team on: +44(0)1323 810981 or email: sales@quorumtech.com.


Coaters for EM and thin film applications - a quick overview

The Q150T is suitable for SEM, TEM and many thin film applications. It is available in three formats: as a sputter coater, carbon coater or both in a single compact system.

The rotary-pumped Q150R is suitable for W-SEM sputtering non-oxidising (noble) metals and for carbon coating SEM specimens for EDS and WDS.

For larger specimens, the Q300R T (rotary-pumped) and Q300T T (turbomolecular-pumped) models allow coating of a single large diameter specimen up to 8"/200 mm (e.g. a wafer), or multiple smaller specimens over a similar diameter. Both have triple sputtering heads to ensure even deposition. 

For thin film applications the Q300T D Dual Target Sequential Sputter Coater allows consecutive metal layers to be deposited without the need to break vacuum.

The Q150 GB is a modular version of the Q150T ES designed to be integrated into a glove box.

Completing the range is the SC7620, a compact, entry-level SEM sputter coater which is available with an optional carbon fibre evaporation attachment.

If you would like to talk to a member of our sales team in the UK about our market-leading coaters please call us on: +44(0)1323 810981 or email: sales@quorumtech.com.

SC7620 Mini Sputter Coater/Glow Discharge System

The SC7620 is a compact entry-level SEM sputter coater. When combined with the optional SC7620-CF carbon fibre evaporation attachment it makes the ideal low-cost SEM sputtering and carbon coating system package. Additionally, the SC7620 is fitted as standard with a glow discharge function, making it ideal for the hydrophilisation, or ’wetting’, of carbon-coated TEM grids and for other surface modifications.

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Q150R Rotary-Pumped Sputter Coater/Carbon Coater

The Q150R is a compact rotary-pumped coating system suitable for SEM sputtering with noble metals (e.g. Au, Pd, Au/Pd and Pt) and for carbon coating SEM specimens for EDS and WDS. 

The Q150R is available in three formats: 

  • Sputtering (Q150R S)
  • Carbon fibre evaporation (Q150R E) 
  • Sputtering and carbon fibre evaporation (Q150R ES)

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Q150T Turbo-Pumped Sputter Coater/Carbon Coater

The Q150T is a compact turbomolecular-pumped coating system suitable for SEM, TEM and many thin film applications. 

The Q150T is available in three formats: 

  •  High resolution sputtering of oxidising and non-oxidising metals (Q150T S)
  •  High vacuum carbon evaporation for SEM and TEM applications (Q150T E)
  •  High resolution sputtering and high vacuum carbon coating (Q150T ES)

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Q150 GB Turbo-Pumped Sputter Coater / Carbon Coater for Glove Box

The Q150GB is a modular glove box version of the market-leading Q150T ES bench top turbomolecular-pumped coating system - suitable for SEM, TEM and many thin-film applications. The Q150 GB comes as standard with sputtering and carbon rod evaporation inserts and a rotating specimen stage. Options include a metal evaporation, glow discharge, film thickness measurement and special stages to suit a range of specimen types

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Q300R T Triple Target, Large Chamber, Rotary-Pumped Sputter Coater

The Q300R T is a large chamber, rotary-pumped coating system ideally suited for sputtering a single large diameter specimen up to 8"/200 mm (e.g. a wafer), or multiple smaller specimens over a similar diameter. The Q300R T is suitable for sputtering with noble metals, e.g. gold (Au), gold/palladium (Au/Pd) and platinum (Pt). For oxidising metals see: Q300T T.

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Q300T T Triple Target, Large Chamber, Turbo-Pumped Sputter Coater

The Q300T T is a large chamber, turbo-pumped coating system ideally suited for sputtering a single large diameter specimen up to 8"/200mm (eg a wafer), or multiple smaller specimens over a similar diameter. The Q300T T is suitable for sputtering both noble and oxidising metals for SEM specimen preparation and for thin film applications.

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Q300T D Dual Target Sequential Sputtering System

The Q300T D is a fully automatic, large chamber, dual-head sputter coater ideally suited for thin film applications and for conductive coating of scanning electron microscopy (SEM) specimens. The dual-head configuration allows two different oxidising or non-oxidising metals to be sequentially sputtered without the need to 'break' vacuum. A dual channel film thickness monitor option is available.

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