Get a Quote

Sputter Coaters and SEM/ TEM Carbon Coaters

Quorum manufacture the market-leading Q Series of sputter coaters and carbon coaters. The advanced Q150 and Q300 models are used in EM laboratories around the world - and increasingly for many thin film coating applications.

Sputter coating is the standard method for preparing non-conducting or poorly conducting specimens prior to observation in a scanning electron microscope (SEM). Quorum offer low-cost, rotary-pumped sputter coaters for depositing non-oxidising metals - such as gold (Au) and platinum (Pt) - and turbomolecular-pumped coaters, suitable for both oxidising and non-oxidising metals, such as chromium (Cr). Large chamber sputter coaters are available for specimens up to 200 mm in diameter. Most Quorum coaters can also be configured for carbon evaporation using easy-change carbon rod and carbon fibre inserts. 


Need help selecting the correct coater for your needs?

Then our "Coater Selection Guide" can help you.

For further assistance please contact our UK sales team on: +44(0)1323 810981 or email: sales@quorumtech.com.


Coaters for EM and thin film applications - a quick overview

The Q150T coater is suitable for SEM, TEM and many thin film applications. It is available in three formats: as a sputter coater, carbon coater or both sputtering and carbon evaporation in a single compact system.

The rotary-pumped Q150R coater is suitable for W-SEM sputtering applications using non-oxidising metals and for carbon coating SEM specimens for EDS and WDS.

For larger specimens, the Q300R T (rotary-pumped) and Q300T T (turbomolecular-pumped) models allow coating of a single large diameter specimen up to 8"/200 mm (e.g. a wafer), or multiple smaller specimens over a similar diameter. Both have triple sputtering heads to ensure even coating deposition. 

For thin film applications the Q300T D Dual Target Sequential Sputter Coater allows consecutive metal layers to be sputtered without the need to break vacuum.

The Q150 GB is a modular version of the Q150T ES coater designed to be integrated into a glove box.

Completing the range is the SC7620, a compact, entry-level SEM sputter coater which is available with an optional carbon fibre evaporation attachment.

If you would like to talk to a member of our sales team in the UK about our market-leading coaters please call us on: +44(0)1323 810981 or email: sales@quorumtech.com.

SC7620 Mini Sputter Coater/Glow Discharge System

The SC7620 is a compact entry-level SEM sputter coater. When combined with the optional SC7620-CF carbon fibre evaporation attachment it makes the ideal low-cost SEM sputtering and carbon coating system package. Additionally, the SC7620 is fitted as standard with a glow discharge function, making it ideal for the hydrophilisation, or ’wetting’, of carbon-coated TEM grids and for other surface modifications.

More info

Q150R Rotary-Pumped Sputter Coater/Carbon Coater

The Q150R is a compact rotary-pumped coating system suitable for SEM sputtering with noble metals (e.g. Au, Pd, Au/Pd and Pt) and for carbon coating SEM specimens for EDS and WDS. 

The Q150R is available in three formats: 

  • Sputtering (Q150R S)
  • Carbon fibre evaporation (Q150R E) 
  • Sputtering and carbon fibre evaporation (Q150R ES)

More info

Q150T Turbo-Pumped Sputter Coater/Carbon Coater

The Q150T is a compact turbomolecular-pumped coating system suitable for SEM, TEM and many thin film applications. 

The Q150T is available in three formats: 

  •  High resolution sputtering of oxidising and non-oxidising metals (Q150T S)
  •  High vacuum carbon evaporation for SEM and TEM applications (Q150T E)
  •  High resolution sputtering and high vacuum carbon coating (Q150T ES)

More info

Q150 GB Turbo-Pumped Sputter Coater / Carbon Coater for Glove Box

The Q150GB is a modular glove box version of the market-leading Q150T ES bench top turbomolecular-pumped coating system - suitable for SEM, TEM and many thin-film applications. The Q150 GB comes as standard with sputtering and carbon rod evaporation inserts and a rotating specimen stage. Options include a metal evaporation, glow discharge, film thickness measurement and special stages to suit a range of specimen types

More info

Q300R T Triple Target, Large Chamber, Rotary-Pumped Sputter Coater

The Q300R T is a large chamber, rotary-pumped coating system ideally suited for sputtering a single large diameter specimen up to 8"/200 mm (e.g. a wafer), or multiple smaller specimens over a similar diameter. The Q300R T is suitable for sputtering with noble metals, e.g. gold (Au), gold/palladium (Au/Pd) and platinum (Pt). For oxidising metals see: Q300T T.

More info

Q300T T Triple Target, Large Chamber, Turbo-Pumped Sputter Coater

The Q300T T is a large chamber, turbo-pumped coating system ideally suited for sputtering a single large diameter specimen up to 8"/200mm (eg a wafer), or multiple smaller specimens over a similar diameter. The Q300T T is suitable for sputtering both noble and oxidising metals for SEM specimen preparation and for thin film applications.

More info

Q300T D Dual Target Sequential Sputtering System

The Q300T D is a fully automatic, large chamber, dual-head sputter coater ideally suited for thin film applications and for conductive coating of scanning electron microscopy (SEM) specimens. The dual-head configuration allows two different oxidising or non-oxidising metals to be sequentially sputtered without the need to 'break' vacuum. A dual channel film thickness monitor option is available.

More info