RotaQ ES
Rotary pumped coater suitable for sputtering non-oxidising metals (Au, Au/Pd, Ag, Pt, and Pt/Pd), and carbon evaporation.
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Key Features
- Capable of achieving vacuum of 5x10⁻⁵ mbar
- Chromium target as standard
- Capable of sputtering non-oxidizing and oxidizing metals e.g. Cr, Ir, W, Al, Ti, Au, Pt
- Capable of carbon rod evaporation (carbon fibre evaporation available as option)
- Modular system for mounting in glove boxes
- Integral glove box pressure monitoring
- Remote operation from touchscreen control panel
Details
Turbo pumped coater suitable for sputtering oxidising and non-oxidising metals, and carbon evaporation. Modular design enables vacuum chamber to be mounted into a glovebox.
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