27659. Q150R S Plus Sputter Coater.Fully automatic, capacitive touch-screen controled rotary pumped sputter coater with status LED indicator. Including 10587 quick release sputter insert and one SC502-314A 57mm diameter x 0.1mm gold target. 10067 rotating specimen stage, 50mm diameter, supplied as standard.
27660. Q150R E Plus Carbon Evaporator. Fully automatic, capacitive touch-screen controled rotary pumped carbon fibre evaporation coater with status LED indicator. Including 10355 quick-release carbon fibre insert for evaporation of carbon cord. Supplied with C5421 carbon fibre cord, 10067 rotating specimen stage, 50mm diameter, supplied as standard.
27652. Q150R ES Combined Sputtering and Carbon Coating System. Consists of fully automatic, capacitive touch-screen controled rotary pumped sputter coater and carbon evaporator with status LED indicator. Including 10587 quick release sputter insert and one SC502-314A 57mm diameter x 0.1mm gold target, and carbon fibre evaporation coater, including 10355 quick-release carbon fibre insert for evaporation of carbon cord. Coating inserts are interchangeable and can be swapped in seconds. The intelligent system logic automatically recognises which insert is in place and displays the appropriate operating settings. 10067 rotating specimen stage, 50mm diameter, supplied as standard.
Rotary pump requirements
13034. Pfeiffer pump 5 m3/hr two-stage rotary pump with oil mist filter. See: Rotary Pumps and Dry Pumps for details.
Options and accessories
Head inserts and glow discharge
10879. Carbon rod evaporation insert for 3.05 mm Ø rods (R E and R ES only). Includes carbon rod shaper 13232 and wedge tool 2097. C5422 (3.05 mm Ø x 300 mm packet of ten) carbon rods.
10726. Additional sputter insert for quick metal change (RE and R ES version only). NB: this is an entire sputtering assembly – individual targets can also be purchased
10262. Glow discharge insert. Used to modify surface properties (e.g. hydrophobic to hydrophilic conversion) (R S and R ES versions only). Can be retrofitted.
All rotating stages have variable rotation of between 8 and 20 rpm.
10067. 50 mm stage
10357. Tilt stage assembly. 50 mm diameter specimen stage with adjustable tilt up to 90 degrees.
10358. Specimen stage for glass microscope slides (up to two x 75 mm x 25 mm slides).
10360. “Rotacota” type stage assembly. Variable tilt angle, planetary stage, rotational speed 8-20rpm
10458. 4″ Wafer stage and gearbox assembly
10787. 4” wafer stage. A flat 4″/102 mm flat, drop-in wafer stage which accepts 2″, 3″, 4″ wafers
23850. Tilt stage sub-assembly 4″
10788. 4″ Stub holder
10808. Eight-place stub stage. For 25 mm and 30 mm Ǿ stubs
10856. 14-place stub stage. For 25 mm and 30 mm Ǿ stubs
12043. Cover slip stage. 92 mm Ǿ stage accepts nine 20 x 20 mm cover slips.
12305 Four-place 25 mm stub stage
Other options and accessories
10454. Film thickness monitor (FTM) attachment. Including oscillator, feed-through, quartz crystal holder and quartz crystals.
C5460. Spare quartz crystal.
10429. Extended height vacuum chamber. (214 mm high – the standard chamber is 127 mm high). For increased source-to- specimen distance and for coating large specimens.
10731. Rotating vacuum spigot. Allows a more convenient connection of the vacuum hose to the rear of the Q150R Plus – useful for when bench depth is limited.
13530. Standard coating shield assembly.
11880. Extend height coating shield assembly.
10068. Additional standard glass cylinder assembly. Includes standard glass chamber, implosion guard and gaskets.
13711. Platinum coating vacuum hose assembly. Recommended for if platinum (Pt) is to be sputtered (R S and R ES versions only)
The Q150R Plus S and Q150R Plus ES are fitted as standard with a 0.1 mm thick gold (Au) target (SC502-314A). Targets are 57 mm Ø x 0.1 mm thick (unless specified otherwise).
SC502-314A. Gold (Au).
SC502-314A/0.2 mm. Gold (Au) 0.2 mm.
TK8889. Gold (Au) 0.3 mm.
TK8891. Gold/palladium (Au/Pd – 80:20) 0.3 mm.
SC502-314B. Gold/palladium (Au/Pd).
SC502-314B/0.2mm. Gold/palladium (Au/Pd – 80:20) 0.2 mm.
SC502-314C. Platinum (Pt).
SC502-314C/0.2mm. Platinum (Pt) 0.2 mm.
TK8893. Platinum (Pt) 0.3 mm.
TK8887. Platinum/palladium (Pt/Pd – 80:20%) 0.3 mm.
SC502-314E. Silver (Ag).
SC502-314G. Palladium (Pd).
SC502-314H. Copper (Cu).
C5421. Carbon cord – 1 m.
C5421-10. Carbon cord – 10 m.
C5421-100. Carbon cord – 100 m.
C5422. Carbon rods – 3.05mm dia x 300mm length (unshaped) pack of 10
C5461. Carbon fibre – fine strands (1m)
C5461-10. Carbon fibre – fine strands (10m)
C5461-100. Carbon fibre – fine strands (100m)
13232. Manual carbon rod shaper 1.2 mm and 1.4 mm Ø carbon rods.
12097. Wedge tool
Other consumables and spare kits
10730. Two-year spares kit for Q150R Plus S. Includes: SC502-314A 57 mm Ø x 0.1 mm gold (Au) target, standard glass chamber assembly, C5460 quartz crystals, O-rings etc.
10729. Two-year spares kit for Q150R Plus E. Includes: C5421 carbon cord, standard glass chamber assembly, C5460 quartz crystals, O-rings, springs etc.
10728. Two-year spares kit for Q150R Plus ES. Includes: SC502-314A 57 mm Ø x 0.1 mm gold (Au) target, C5421 carbon cord, standard glass chamber assembly, C5460 quartz crystals, O-rings, springs etc.
O7803. Basic oil mist filter (spare)
13233. Pump oil 1 litre
13235. Pump oil 5 litre
23606. L Gasket (each)