Q150T S Sputter Coater. High resolution turbomolecular pumped capacitive touch-screen controlled sputter coater with status LED indicator , including 10034 quick release sputter insert and one TK8845 57mm diameter x 0.3mm chromium target. 10067 rotating specimen stage, 50mm diameter, supplied as standard.
Q150T E Plus Carbon Evaporator. Turbomolecular pumped capacitive touch-screen controlled carbon evaporator with status LED indicator suitable for TEM and SEM applications. Fitted with a carbon rod evaporation head for 3.05mm diameter carbon rods. Supplied with carbon rods (C5422 3.05mm x 300mm) and a carbon rod shaper (manual operation). 10067 rotating specimen stage, 50mm diameter, supplied as standard.
Q150T ES Plus Combined Sputtering and Carbon Coating System. The deposition heads can be swapped in seconds and the intelligent system logic automatically recognises which head is in place and displays the appropriate operating settings. Consists of high resolution turbomolecular pumped capacitive touch-screen controlled sputter coater and carbon evaporator with status LED indicator , including 10034 quick release sputter insert and one TK8845 57mm diameter x 0.3mm chromium target, and high vacuum carbon rod evaporation coater, including 10033 quick-release carbon rod insert for 3.05mm diameter carbon rods. Coating inserts are interchangeable. 10067 rotating specimen stage, 50mm diameter, supplied as standard.
Rotary pump requirements
13034. Pfeiffer 5 m3/hr DUO 6 two-stage rotary pump with oil mist filter.
Dry pumping options:
11540. Diaphragm pump. Vacuubrand MD1 23 L/m.
For further information see: Rotary Pumps and Dry Pumps for details.
Options and accessories
Head inserts and glow discharge
10455. Carbon cord insert. Supplied with 2 m C5421 carbon fibre cord. For additional carbon see: Carbon Supplies (below).
10456. Carbon rod evaporation insert. For 6.15mm diameter rods.
10457. Metal evaporation and aperture insert. Including the ability to evaporate upwards or downwards (T E Plus and T ES Plus version only). Supplied with a pack of 10 tungsten filaments (B5230) and a molybdenum (Mo) boat.
10453. Additional sputter insert for quick metal change (T E Plus and T ES Plus version only). NB: this is an entire sputtering assembly – individual targets can also be purchased
10262. Glow discharge insert. Used to modify surface properties (e.g. hydrophobic to hydrophilic conversion) (T S and T ES versions only). Can be retrofitted.
All rotating stages have variable rotation of between 8 and 20 rpm.
10067. 50mm stage
10357. Tilt stage assembly. 50mm diameter specimen stage with adjustable tilt up to 90 degrees
10358. Specimen stage for glass microscope slides (up to two x 75 mm x 25 mm slides).
10360. “Rotacota” Type Stage. Variable tilt angle, rotary planetary specimen stage, 50mm diameter (rotational speed 8-20rpm)
10458. 4″ Wafer Stage and Gearbox. Flat rotation specimen stage. Includes gear box for increased coating area coverage.
10787. 4” wafer stage. A flat 4″/102mm flat, drop-in wafer stage which accepts 2″, 3″ or 4″ wafers.
10788. 4″ stub holder
10808. Eight-place stub stage. For 25 mm and 30 mm Ǿ stubs
11856. 14-place stub stage. For 25 mm and 30 mm Ǿ stubs
12043. Nine place cover slip stage. 92 mm Ǿ stage accepts nine 20 x 20 mm cover slips.
12305. Four-place 25 mm stub stage
23850. Tilt stage assembly 4″
Other options and accessories
10454. Film thickness monitor (FTM) attachment. Including oscillator, feed-through, quartz crystal holder and quartz crystals.
C5460. FTM Spare quartz crystal.
10428. Full range gauge for high vacuum measurement.
10429. Extended height vacuum chamber. (214 mm high – the standard chamber is 127 mm high). For increased source-to- specimen distance and for coating large specimens.
10422. Rotating vacuum spigot. Allows a more convenient connection of the vacuum hose to the rear of the Q150T Plus – useful for when bench depth is limited.
13530. Standard coating shield assembly.
11880. Extend height coating shield assembly.
The Q150T S and Q150T ES are fitted as standard with a 0.3 mm thick chromium (Cr) target (TK8845). All targets are 57 mm in diameter and 0.1 mm thick unless otherwise stated.
SC502-314A. Gold (Au).
SC502-314A/0.2mm. Gold (Au) 0.2 mm.
TK8889. Gold (Au) 0.3 mm.
SC502-314B. Gold/palladium (Au/Pd – 80:20).
SC502-314B/0.2mm. Gold/palladium (Au/Pd – 80:20%) 0.2 mm.
TK8891. Gold/palladium (Au/Pd – 80:20) 0.2 mm.
SC502-314C. Platinum (Pt).
SC502-314C/0.2mm. Platinum (Pt) 0.2 mm.
TK8893. Platinum (Pt) 0.3 mm.
SC502-314D. Nickel (Ni).
SC502-314E. Silver (Ag).
SC502-314G. Palladium (Pd).
SC502-314H. Copper (Cu).
TK8878. Platinum/Palladium (Pt/Pd – 80:20).
TK8887. Platinum/Palladium (Pt/Pd – 80:20) 0.3 mm.
TK8845. Chromium (Cr) 0.3 mm.
TK8862. Chromium (Cr)1.5 mm.
TK8867. Tungsten (W) 0.2 mm.
TK8846. Tungsten (W) 0.5 mm.
TK8869. Carbon (C) 1.5 mm.
TK8875. Aluminium (Al) 1 mm.
TK8895. Titanium (Ti) 0.5 mm.
TK8879. Titanium (Ti) 1.5 mm.
TK8897. Iron (Fe).
TK8899. Iridium (Ir) 0.3 mm.
TK8900. Cobolt (Co) 0.3 mm.
TK8902. Tin (Si).
TK8905. Magnesium (Mg) 0.3 mm thick.
TK8906. Tantalum (Ta).
TK8907. Indium tin oxide (ITO)
A0830A. Carbon rods – 6.15 mm Ø x 100 mm length (unshaped) – pack of 10.
C5422. Carbon rods 3.05 Ø x 100 mm, (unshaped) – pack of 10.
C5421. Carbon fibre cord – 1 m.
C5421-10. Carbon fibre cord – 10 m.
C5421-100. Carbon fibre cord – 100 m.
C5461. Carbon fibre – fine strands 1 m.
C5461-10. Carbon fibre – fine strands 10 m.
C5461-100. Carbon fibre – fine strands 100 m.
13232. Manual carbon rod shaper for 3.05 mm Ø carbon rods.
12097. Wedge tool
Other consumables and spare kits
B5230. Tungsten filament basket – pack of 10 (for use with 10457 metal evaporation insert).
B5228. Molybdenum boats – pack of 10.
G6260. Glass cylinder 6″ diameter.
10068. Additional glass cylinder assembly.
10429. Extended glass cylinder assembly.
13233. Supergrade ‘A’ rotary pump oil – 1 L.
13235. Supergrade ‘A’ rotary pump oil – 5 L.
O7803. Oil mist filter.
10447. Two-year spares kit for Q150T S Plus
10448. Two-year spares kit for Q150T E Plus
10449. Two-year spares kit for Q150T ES Plus
23606. L Gasket (each)