Sputter and Carbon Coaters

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    Q150T Plus – Turbomolecular pumped coater

    The Q150T Plus is optimised for use with a turbomolecular pump, which gives a lower vacuum down to 5 x 10-5 mbar. This enables the sputtering of oxidising metals, which have a lower grain size suitable for high-resolution imaging. Similarly, lower scattering allows for high purity, amorphous carbon films of high density.

    Key features

    • New touch and swipe capacitive screen
    • USB port for upgrades and download of process log files
    • Multiple-user profiles can be set up on one machine
    • New software sorts recipes per user according to recent use
    • 16GB of memory can store more than 1000 recipes
    • New multi-colour LED visual status indicator
    • Capable of achieving vacuum of 5 x 10 -5 mbar

    Click to download the product brochure

    • Product Description
    • Images
    • Ordering information
    • Additional Information
    • Downloads & Specifications

    The Q150T Plus is available in three configurations:

    • Q150T S Plus   an automatic sputter coater for non-oxidising metals. Sputtering targets include; Cr, Ir, W, ITO, Al           other targets available
    • Q150T E Plus  –  an automatic carbon cord coater for SEM applications such as EDS and WDS.Metal evaporation/aperture cleaning option available.
    • Q150T ES Plus –  a combined system system capable of both sputtering and carbon coating. The deposition heads can be swapped in seconds.

    Metal evaporation/aperture cleaning option available.

    Recommended applications for Q150T Plus:

    •  High-resolution magnification SEM

    •  Protective platinum layers for FIB

    •  R&D of corrosion-, friction-, and wear protective layers

    •  Protective layers on medical devices

    •  BSE imaging

    •  EDX, WDS, EBSD analysis

    •  Carbon coating of replicas

    These products are for Research Use Only. 

    New user interface has been thoroughly updated:

    • Capacitive touch screen is more sensitive for ease of use
    • User interface software has been extensively revised, using a modern smartphone-style interface
    • Comprehensive context-sensitive help screen
    • USB interface allows easy software updates and backing up/copying of recipe files to USB stick
    • Process log files can be exported via USB port in .csv format for analysis in Excel or similar. Log files include date, time and process parameters
    • 16GB of flash memory can store more than 1000 recipes
    • Dual-core ARM processor for a fast, responsive display

    Allows multiple users to input and store coating recipes, with a new feature to sort recipes per user according to recent use.

    Intelligent system logic automatically detects which insert is in place and displays the appropriate operating settings and controls for that process.

    The system prompts the user to confirm the target material and it then automatically selects appropriate parameters for that material.

    Intuitive software allows the most inexperienced or occasional operator to rapidly enter and store their own process data. For convenience, a number of typical sputtering and carbon coating profiles are already stored but also allows the user to create their own.

    Software detects failure to achieve vacuum in a set period of time and shuts down the process in case of vacuum leak, which ensures pump protection from overheating.

    Automatic, controlled pulsed carbon cord evaporation

    Careful evaporation allows precise control of carbon thickness (with or without the optional film thickness monitor). The quality of the resulting carbon films is also enhanced by the eradication of “sparking” that is a common feature of less advanced coaters.

    For reproducible high-quality carbon films, we would recommend the use of shaped carbon rods. Rods are higher purity, less susceptible to debris and easier to control. Pulsed and ramped carbon rod recipes are supplied as standard.

    Multiple stage options

    The Q150T Plus has specimen stages to meet most requirements. All are easy-change, drop-in style (no screws) and are height adjustable (except for the rotary planetary stage).

    Some examples:

    • Rotation stage (supplied as standard): 50 mm Ø can accommodate six standard stubs. Height can be pre-set.
    • Rotate-tilt stage for improved uniform coating: 50 mm Ø. Tilt and height can be pre-set.
    • Variable angle, rotary planetary stage for heavily contoured samples.
    • Large flat rotation stage with offset gear box for 4”/100 mm wafers.
    • Rotation stage for glass microscope slides.

    Other options are available on request. 


    The Q150T Plus meets key industry CE standards

    • All electronic components are protected by covers
    • Implosion guard prevents user injury in event of chamber failure
    • Vacuum interlocks remove power from deposition sources to prevent user exposure to high voltage in event of chamber being opened
    • Electrical interlocks remove power when source head cover opened
    • Overheating protection shuts down power supply

    No. Q150TSPLUS
    Q150T S Sputter Coater. High resolution turbomolecular pumped capacitive touch-screen controlled sputter coater with status LED indicator , including 10034 quick release sputter insert and one TK8845 57mm diameter x 0.5 mm chromium target. 10067 rotating specimen stage, 50mm diameter, supplied as standard.
    No. Q150TEPLUS
    Q150T E Plus Carbon Evaporator. Turbomolecular pumped capacitive touch-screen controlled carbon evaporator with status LED indicator suitable for TEM and SEM applications. Fitted with a carbon rod evaporation head for 3.05mm diameter carbon rods. Supplied with carbon rods (C5422 3.05mm x 300mm) and a carbon rod shaper (manual operation). 10067 rotating specimen stage, 50mm diameter, supplied as standard.
    No. Q150TESPLUS
    Q150T ES Plus Combined Sputtering and Carbon Coating System. The deposition heads can be swapped in seconds and the intelligent system logic automatically recognises which head is in place and displays the appropriate operating settings. Consists of high resolution turbomolecular pumped capacitive touch-screen controlled sputter coater and carbon evaporator with status LED indicator , including 10034 quick release sputter insert and one TK8845 57mm diameter x 0.5 mm chromium target, and high vacuum carbon rod evaporation coater, including 10033 quick-release carbon rod insert for 3.05mm diameter carbon rods. Coating inserts are interchangeable. 10067 rotating specimen stage, 50mm diameter, supplied as standard.

    Rotary pump requirements

    13034. Pfeiffer 5 m3/hr DUO 6 two-stage rotary pump with oil mist filter.

    Dry pumping options:

    11540. Diaphragm pump. Vacuubrand MD1 23 L/m.

    For further information see: Rotary Pumps and Dry Pumps for details.

    Options and accessories

    Head inserts and glow discharge

    10455. Carbon cord insert. Supplied with 2 m C5421 carbon fibre cord. For additional carbon see: Carbon Supplies (below).

    10456.  Carbon rod evaporation insert. For 6.15mm diameter rods.

    10457. Metal evaporation and aperture insert. Including the ability to evaporate upwards or downwards (T E Plus and T ES Plus version only). Supplied with a pack of 10 tungsten filaments (B5230) and a molybdenum (Mo) boat.

    10453. Additional sputter insert for quick metal change (T E Plus and T ES Plus version only). NB: this is an entire sputtering assembly – individual targets can also be purchased

    10262. Glow discharge insert. Used to modify surface properties (e.g. hydrophobic to hydrophilic conversion) (T S and T ES versions only). Can be retrofitted.

    Specimen stages 

    All rotating stages have variable rotation of between 8 and 20 rpm.

    10067.  50mm stage

    10357.  Tilt stage assembly. 50mm diameter specimen stage with adjustable tilt up to 90 degrees 

    10358. Specimen stage for glass microscope slides (up to two x 75 mm x 25 mm slides).

    10360. “Rotacota” Type Stage. Variable tilt angle, rotary planetary specimen stage, 50mm diameter (rotational speed 8-20rpm)

    10458. 4″ Wafer Stage and Gearbox. Flat rotation specimen stage. Includes gear box for increased coating area coverage.

    10787. 4” wafer stage. A flat 4″/102mm flat, drop-in wafer stage which accepts 2″, 3″ or 4″ wafers.

    10788.  4″ stub holder

    10808. Eight-place stub stage. For 25 mm and 30 mm Ǿ stubs

    11856. 14-place stub stage. For 25 mm and 30 mm Ǿ stubs

    12043. Nine place cover slip stage. 92 mm Ǿ stage accepts nine 20 x 20 mm cover slips.

    12305.  Four-place 25 mm stub stage

    23850.  Tilt stage assembly 4″

    Other options and accessories

    10454. Film thickness monitor (FTM) attachment. Including oscillator, feed-through, quartz crystal holder and quartz crystals.

    C5460. FTM Spare quartz crystal.

    10428. Full range gauge for high vacuum measurement.

    10429. Extended height vacuum chamber. (214 mm high – the standard chamber is 127 mm high). For increased source-to- specimen distance and for coating large specimens.

    10422. Rotating vacuum spigot. Allows a more convenient connection of the vacuum hose to the rear of the Q150T Plus – useful for when bench depth is limited.

    13530. Standard coating shield assembly.

    11880. Extend height coating shield assembly.

    Sputtering targets

    The Q150T S and Q150T ES are fitted as standard with a 0.3 mm thick chromium (Cr) target (TK8845). All targets are 57 mm in diameter and 0.1 mm thick unless otherwise stated.

    SC502-314A. Gold (Au).

    SC502-314A/0.2mm. Gold (Au) 0.2 mm.

    TK8889. Gold (Au) 0.3 mm.

    SC502-314B. Gold/palladium (Au/Pd – 80:20).

    SC502-314B/0.2mm. Gold/palladium (Au/Pd – 80:20%) 0.2 mm.

    TK8891. Gold/palladium (Au/Pd – 80:20) 0.2 mm.

    SC502-314C. Platinum (Pt).

    SC502-314C/0.2mm. Platinum (Pt) 0.2 mm.

    TK8893. Platinum (Pt) 0.3 mm.

    SC502-314D. Nickel (Ni).

    SC502-314E. Silver (Ag).

    SC502-314G. Palladium (Pd).

    SC502-314H. Copper (Cu).

    TK8878. Platinum/Palladium (Pt/Pd – 80:20).

    TK8887. Platinum/Palladium (Pt/Pd – 80:20) 0.3 mm.

    TK8845. Chromium (Cr) 0.5 mm.

    TK8862. Chromium (Cr)1.5 mm.

    TK8867. Tungsten (W) 0.2 mm.

    TK8846. Tungsten (W) 0.5 mm.

    TK8869. Carbon (C) 1.5 mm.

    TK8875. Aluminium (Al) 1 mm.

    TK8895. Titanium (Ti) 0.5 mm.

    TK8879. Titanium (Ti) 1.5 mm.

    TK8897. Iron (Fe).

    TK8899. Iridium (Ir) 0.3 mm.

    TK8900. Cobolt (Co) 0.3 mm.

    TK8902. Tin (Si).

    TK8903. Molybdenum.

    TK8905. Magnesium (Mg) 0.3 mm thick.

    TK8906. Tantalum (Ta).

    TK8907. Indium tin oxide (ITO)

    Carbon supplies

    A0830A. Carbon rods – 6.15 mm Ø x 100 mm length (unshaped) – pack of 10.

    C5422. Carbon rods 3.05 Ø x 100 mm, (unshaped) – pack of 10.

    C5421. Carbon fibre cord – 1 m.

    C5421-10. Carbon fibre cord – 10 m.

    C5421-100. Carbon fibre cord – 100 m.

    C5461.  Carbon fibre – fine strands 1 m.

    C5461-10. Carbon fibre – fine strands 10 m.

    C5461-100. Carbon fibre – fine strands 100 m.

    13232. Manual carbon rod shaper for 3.05 mm Ø carbon rods.

    12097.  Wedge tool

    Other consumables and spare kits

    B5230. Tungsten filament basket – pack of 10 (for use with 10457 metal evaporation insert).

    B5228. Molybdenum boats – pack of 10.

    G6260. Glass cylinder 6″ diameter.

    10068. Additional glass cylinder assembly. 

    10429. Extended glass cylinder assembly.

    13233. Supergrade ‘A’ rotary pump oil – 1 L.

    13235. Supergrade ‘A’ rotary pump oil – 5 L.

    O7803. Oil mist filter.

    10447. Two-year spares kit for Q150T S Plus

    10448. Two-year spares kit for Q150T E Plus

    10449. Two-year spares kit for Q150T ES Plus

    23606.  L Gasket (each)

    Instrument case

    585 mm W x 521 mm D x 410 mm H

    (total height with coating head open: 650 mm)


    32 kg (packed: 42 kg)

    Packed dimensions

    725 mm W x 660 mm D x 680 mm H

    Work chamber

    Borosilicate glass 150 mm ID x 133 mm H


    115.5mm W x 86.4mm H (active area), 640 RGB x 480 (display format), capacitive touch colour display

    User interface

    Full graphical interface with touch screen buttons, includes features such as a log of the last 1000 coatings and reminders for when maintenance is due.

    Sputter target

    Disc-style 57 mm Ø. A 0.3 mm thick chromium (Cr) is fitted as standard. T S and T ES versions only

    Specimen stage

    50 mm Ø rotation stage with rotation speed of 8-20 rpm. Other stages available on request.


    Rotary pump: 5 m3/hr two-stage rotary pump with oil mist filter. Hydraulically-formed bellows stainless-steel backing line.

    Turbo pump:   Internally mounted 67 L/sec N2, air-cooled

    Vacuum Measurement: Pirani guage as standard. A wide range guage is available as an option.

    Ultimate vacuum: 5 x 10-5 mbar*

    Sputter vacuum range: Between 5 x 10-3 and 1 x 10-1mbar

    *Typical ultimate vacuum of the pumping system in a clean instrument after pre-pumping and venting with dry nitrogen gas


    Sputtering: Sputter current 1-150 mA to a predetermined thickness (with optional FTM) or by the built-in timer. The maximum sputtering time is 60 minutes (without breaking vacuum and with automatically built-in cooling periods)

    Evaporation: Carbon evaporation using rods/cord. Thermal evaporation of metals from filaments or boats. For cleaning TEM apertures a standard molybdenum boat (supplied) can be fitted

    Visual status indicator

    A large multi-colour status indicator light provides a visual indication of the state of the equipment, allowing users to easily identify the status of a progress at a distance.

    The indicator LED shows the following states:

    •  Initialisation

    •  Process running

    •  Idle

    •  Coating in progress

    •  Process completed

    •  Process ended in fault condition

    Audio indication also sounds on completion of the process.



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