Q150V S Sputter Coater optimised for high-vacuum applications. High resolution turbomolecular pumped capacitive touch-screen controlled sputter coater with status LED indicator, including 10034 quick release sputter insert and one TK8845 57mm diameter x 0.3mm chromium target. 10067 rotating specimen stage, 50mm diameter, supplied as standard.
Q150V E Carbon Evaporator optimised for high-vacuum applications. Turbomolecular pumped capacitive touch-screen controlled carbon evaporator with status LED indicator suitable for TEM and SEM applications. Fitted with a carbon rod evaporation head for 3.05mm diameter carbon rods. Supplied with carbon rods (C5422 3.05mm x 300mm) and a carbon rod shaper (manual operation). 10067 rotating specimen stage, 50mm diameter, supplied as standard.
Q150V ES Combined Sputtering and Carbon Coating System optimised for high-vacuum applications
The deposition heads can be swapped in seconds and the intelligent system logic automatically recognises which head is in place and displays the appropriate operating settings. Consists of high resolution turbomolecular pumped capacitive touch-screen controled sputter coater and carbon evaporator with status LED indicator, including quick release sputter insert and one TK8845 57mm diameter x 0.3mm chromium target, and high vacuum carbon rod evaporation coater, including quick-release carbon rod insert for 3.05mm diameter carbon rods. Coating inserts are interchangeable. 10067 rotating specimen stage, 50mm diameter, supplied as standard.
Rotary pump requirements
13034 5m3hr-1 2 Stage Oil Sealed Rotary Vane Pump
Dry pumping options:
11540. Diaphragm pump. Vacuubrand MD1 23 L/m
For further information see: Rotary Pumps and Dry Pumps for details.
Options and accessories
Head inserts and glow discharge
10453. Additional sputter insert for quick metal change (V E and V ES version only). NB: this is an entire sputtering assembly – individual targets can also be purchased
10455. Carbon fibre insert. Supplied with 2 m C5421 carbon fibre cord. For additional carbon see: Carbon Supplies (below).
10456. Carbon Rod Evaporation Insert. For 6.15mm diameter carbon rods.
10457. Metal evaporation and aperture insert. Including the ability to evaporate upwards or downwards (V E and V ES version only). Supplied with a pack of 10 tungsten filaments (B5230) and a molybdenum (Mo) boat.
10262. Glow discharge insert
10067 50 mm Stage
10357 Tilt Stage Assembly. 50mm diameter specimen stage with adjustable tilt up to 90 degrees.
10358 Slide Stage. For glass microscope slides (up to 2 x 75mm x 25mm slides).
10360 “Rotacota” Type Stage. Variable tilt angle, planetary stage, rotational speed 8-20 rpm.
10458 4″ Wafer Stage and Gearbox Flat rotation specimen stage for 4″ wafers.
10787 4″ Wafer stage. A flat 4″/102 mm flat, drop-in wafer stage which accepts 2″, 3″ or 4″ wafers
23850 Tilt Stage Assembly 4″
10788 4″ Stub Holder
10808 8 Place Stub Stage for 30mm and 32mm ø stubs
11856 14 Place Stub Stage for 25mm and 30mm ø stubs
12043 9 Place Coverslip Stage 92 mm ø stage accepts nine 20 x 20mm cover slips
12305 4 Place 25mm ø Stub Stage
Other options and accessories
10454 Film Thickness Monitor (FTM) Attachment. Including oscillator, feed-through, quartz crystals and holder. Please note, when evaporating carbon, the FTM ideally should only be used to provide a general indication of the coating thickness. It is not recommended that the FTM is used for termination of the coating process.
C5460 Film Thickness Monitor (FTM) Crystal (spare)
11540 Diaphragm Pump MD1 23 L/M
O7803 Basic Oil Mist Filter (spare)
13233 1L Rotary Pump Oil (spare)
13235 5L Rotary Pump Oil (spare)
27508 O-ring (each) 2 required per coater
27607 Non-seal L Gasket
27728 Q150V ES Two Year Spares Kit. Includes TK8845 chromium target, standard glass cylinder assembly (27608), C5421 carbon fibre cord, C5461 carbon fibre – fine, C5422 carbon rods 3.05mm, C5460 quartz crystals, O-rings, springs.
27729 Q150V E Two Year Spares Kit. Includes Q150V standard glass cylinder assembly (027608), C5421 carbon fibre cord, C5461 carbon fibre – fine, C5422 carbon rods 3.05mm, C5460 quartz crystals, O-rings, springs.
27730 Q150V S Two Year Spares Kit Includes TK8845 chromium target, standard glass cylinder assembly (27608), C5460 quartz crystals, O-rings.
SC502-314A. Gold (Au).
SC502-314A/0.2mm. Gold (Au) 0.2 mm.
TK8889. Gold (Au) 0.3 mm.
SC502-314B. Gold/palladium (Au/Pd – 80:20).
SC502-314B/0.2mm. Gold/palladium (Au/Pd – 80:20%) 0.2 mm.
TK8891. Gold/palladium (Au/Pd – 80:20) 0.2 mm.
SC502-314C. Platinum (Pt).
SC502-314C/0.2mm. Platinum (Pt) 0.2 mm.
TK8893. Platinum (Pt) 0.3 mm.
SC502-314D. Nickel (Ni).
SC502-314E. Silver (Ag).
SC502-314G. Palladium (Pd).
SC502-314H. Copper (Cu).
TK8878. Platinum/Palladium (Pt/Pd – 80:20).
TK8887. Platinum/Palladium (Pt/Pd – 80:20) 0.3 mm.
TK8845. Chromium (Cr) 0.3 mm.
TK8862. Chromium (Cr)1.5 mm.
TK8867. Tungsten (W) 0.2 mm.
TK8846. Tungsten (W) 0.5 mm.
TK8869. Carbon (C) 1.5 mm.
TK8875. Aluminium (Al) 1 mm.
TK8895. Titanium (Ti) 0.5 mm.
TK8879. Titanium (Ti) 1.5 mm.
TK8897. Iron (Fe).
TK8899. Iridium (Ir) 0.3 mm.
TK8900. Cobolt (Co) 0.3 mm.
TK8902. Tin (Si).
TK8905. Magnesium (Mg) 0.3 mm thick.
TK8906. Tantalum (Ta).
TK8907. Indium tin oxide (ITO)
A0830A. Carbon rods – 6.15 mm Ø x 100 mm length (unshaped) – pack of 10.
C5422. Carbon rods 3.05 Ø x 100 mm, (unshaped) – pack of 10.
C5421. Carbon fibre cord – 1 m.
C5421-10. Carbon fibre cord – 10 m.
C5421-100. Carbon fibre cord – 100 m.
C5461 Carbon fibre – fine strands (1m)
C5461-10 Carbon fibre – fine strands (10m)
C5461-100 Carbon fibre – fine strands (100m)
13232. Manual carbon rod shaper for 3.05 mm Ø carbon rods.
12097 Wedge tool
Other consumables and spare parts
27608 Additional Standard Glass Cylinder Assembly. Includes glass chamber, implosion guard and gaskets.
13530 Standard Coating Shield Assembly
27691 Extended Glass Cylinder Assembly. 220mm high (standard chamber is 133mm high). For increased source to sample distance and coating large samples.
11880 Extended Height Coating Shield Assembly
B5230. Tungsten filament basket – pack of 10 (for use with 10457 metal evaporation insert).
B5228. Molybdenum boats – pack of 10.