The Q150V Plus is optimised for high-vacuum applications, with an ultimate vacuum of 1 x 10-6 mbar. Together with the use of a wide-range Penning/Pirani gauge, this enables the sputtering of oxidising metals with ultra-fine grain sizes, which are suitable for high resolution imaging. The lower background pressure removes oxygen nitrogen and water vapour from the chamber, avoiding chemical reactions during the sputter process, which could otherwise lead to impurities or defects in the coatings. Similarly, lower scattering allows for high purity, amorphous carbon films of high density.
The Q150V Plus offers all the benefits of the Q150T Plus, but with a finer grain size and thinner coating, for ultra-high-resolution applications (above x 200,000 magnification).
These products are for Research Use Only.
Allows multiple users to input and store coating recipes, with a new feature to sort recipes per user according to recent use.
Intelligent system logic automatically detects which insert is in place and displays the appropriate operating settings and controls for that process.
System prompts user to confirm target material and it then automatically selects appropriate parameters for that material.
Intuitive software allows the most inexperienced or occasional operator to rapidly enter and store their own process data. For convenience a number of typical sputtering and carbon coating recipes are already stored but also allows the user to create their own. Software detects failure to achieve vacuum in a set period of time and shuts down the process in case of vacuum leak, which ensures pump protection from overheating.
Careful evaporation allows precise control of carbon thickness (with or without the optional film thickness monitor). The quality of the resulting carbon films is also enhanced by the eradication of “sparking” that is a common feature of less advanced coaters.
For reproducible high-quality carbon films, we would recommend the use of shaped carbon rods. Rods are higher purity, less susceptible to debris and easier to control. Pulsed and ramped carbon rod recipes are supplied as standard.
Sputter coating is a technique widely used in various applications; it is possible to create a plasma and sputter metals with high voltage, poor vacuum and no automation. However, this is not suitable for electron microscopy applications because it will heat the sample and can result in damage when the plasma interacts with the sample. The Q150V Plus series uses low temperature enhanced-plasma magnetrons optimised for the turbomolecular pump pressures, combined with low current and deposition control, which ensures your sample is protected and uniformly coated.
The Q150V S Plus and Q150V ES Plus use easy-change, 57 mm diameter, disc-style targets which are designed to sputter oxidising and noble metals. The Q150V S Plus and Q150V ES Plus are fitted as standard with a chromium (Cr) sputter target. Other targets options include: Au, Au/Pd, Pt/Pd, Pd, Pt, Cu, Ir, W, ITO and Al. Others are available on request.
Aluminium (Al) rapidly forms an oxide layer, which can be difficult to remove, but the ES & S Plus have special recipes for aluminium that reduce the oxide removal time and prevent excessive pre-sputtering of the target.
This allows the user to configure the system as a sputter coater, evaporator or glow discharge system – all in one space saving format. A carbon cord evaporation insert is available as an option. Automatic detection of the head type when changed.
Removable glass chamber and easily accessible base and top plate allows for an easy cleaning process.
Users can rapidly change the chamber, if necessary, to avoid cross contamination of sensitive samples.
Tall chamber option is available for carbon evaporation to avoid sample heating, to improve uniformity for sputtering and to hold taller samples.
The Q150V Plus has specimen stages to meet most requirements. All are easy-change, drop-in style (no screws) and are height adjustable (except for the rotary planetary stage).
Some examples:
Other options are available on request.
No. Q150VSPLUS
Q150V S Sputter Coater optimised for high-vacuum applications. High resolution turbomolecular pumped capacitive touch-screen controlled sputter coater with status LED indicator, including 10034 quick release sputter insert and one TK8845 57 mm diameter x 0.5 mm chromium target. 10067 rotating specimen stage, 50 mm diameter, supplied as standard.
13034 5m3hr-1 2 Stage Oil Sealed Rotary Vane Pump
Dry pumping options:
11540. Diaphragm pump. Vacuubrand MD1 23 L/m
For further information see: Rotary Pumps and Dry Pumps for details.
10453. Additional sputter insert for quick metal change (V E and V ES version only). NB: this is an entire sputtering assembly – individual targets can also be purchased
10455. Carbon fibre insert. Supplied with 2 m C5421 carbon fibre cord. For additional carbon see: Carbon Supplies (below).
10456. Carbon Rod Evaporation Insert. For 6.15 mm diameter carbon rods.
10457. Metal evaporation and aperture insert. Including the ability to evaporate upwards or downwards (V E and V ES version only). Supplied with a pack of 10 tungsten filaments (B5230) and a molybdenum (Mo) boat.
10262. Glow discharge insert
Specimen stages
10067 50 mm Stage
10357 Tilt Stage Assembly. 50mm diameter specimen stage with adjustable tilt up to 90 degrees.
10358 Slide Stage. For glass microscope slides (up to 2 x 75 mm x 25 mm slides).
10360 “Rotacota” Type Stage. Variable tilt angle, planetary stage, rotational speed 8-20 rpm.
10458 4″ Wafer Stage and Gearbox Flat rotation specimen stage for 4″ wafers.
10787 4″ Wafer stage. A flat 4″/102 mm flat, drop-in wafer stage which accepts 2″, 3″ or 4″ wafers
23850 Tilt Stage Assembly 4″
10788 4″ Stub Holder
10808 8 Place Stub Stage for 30 mm and 32 mm ø stubs
11856 14 Place Stub Stage for 25 mm and 30 mm ø stubs
12043 9 Place Coverslip Stage 92 mm ø stage accepts nine 20 x 20 mm cover slips
12305 4 Place 25 mm ø Stub Stage
Other options and accessories
10454 Film Thickness Monitor (FTM) Attachment. Including oscillator, feed-through, quartz crystals and holder. Please note, when evaporating carbon, the FTM ideally should only be used to provide a general indication of the coating thickness. It is not recommended that the FTM is used for termination of the coating process.
C5460 Film Thickness Monitor (FTM) Crystal (spare)
11540 Diaphragm Pump MD1 23 L/M
O7803 Basic Oil Mist Filter (spare)
13233 1L Rotary Pump Oil (spare)
13235 5L Rotary Pump Oil (spare)
27508 O-ring (each) 2 required per coater
27607 Non-seal L Gasket
27728 Q150V ES Two Year Spares Kit. Includes TK8845 chromium target, standard glass cylinder assembly (27608), C5421 carbon fibre cord, C5461 carbon fibre – fine, C5422 carbon rods 3.05mm, C5460 quartz crystals, O-rings, springs.
SC502-314A. Gold (Au).
SC502-314A/0.2mm. Gold (Au) 0.2 mm.
TK8889. Gold (Au) 0.3 mm.
SC502-314B. Gold/palladium (Au/Pd – 80:20).
SC502-314B/0.2mm. Gold/palladium (Au/Pd – 80:20%) 0.2 mm.
TK8891. Gold/palladium (Au/Pd – 80:20) 0.2 mm.
SC502-314C. Platinum (Pt).
SC502-314C/0.2mm. Platinum (Pt) 0.2 mm.
TK8893. Platinum (Pt) 0.3 mm.
SC502-314D. Nickel (Ni).
SC502-314E. Silver (Ag).
SC502-314G. Palladium (Pd).
SC502-314H. Copper (Cu).
TK8878. Platinum/Palladium (Pt/Pd – 80:20).
TK8887. Platinum/Palladium (Pt/Pd – 80:20) 0.3 mm.
TK8845. Chromium (Cr) 0.5 mm.
TK8862. Chromium (Cr)1.5 mm.
TK8867. Tungsten (W) 0.2 mm.
TK8846. Tungsten (W) 0.5 mm.
TK8869. Carbon (C) 1.5 mm.
TK8875. Aluminium (Al) 1 mm.
TK8895. Titanium (Ti) 0.5 mm.
TK8879. Titanium (Ti) 1.5 mm.
TK8897. Iron (Fe).
TK8899. Iridium (Ir) 0.3 mm.
TK8900. Cobolt (Co) 0.3 mm.
TK8902. Tin (Si).
TK8903. Molybdenum.
TK8905. Magnesium (Mg) 0.3 mm thick.
TK8906. Tantalum (Ta).
TK8907. Indium tin oxide (ITO)
A0830A. Carbon rods – 6.15 mm Ø x 100 mm length (unshaped) – pack of 10.
C5422. Carbon rods 3.05 Ø x 100 mm, (unshaped) – pack of 10.
C5421. Carbon fibre cord – 1 m.
C5421-10. Carbon fibre cord – 10 m.
C5421-100. Carbon fibre cord – 100 m.
C5461 Carbon fibre – fine strands (1m)
C5461-10 Carbon fibre – fine strands (10m)
C5461-100 Carbon fibre – fine strands (100m)
13232. Manual carbon rod shaper for 3.05 mm Ø carbon rods.
12097 Wedge tool
27608 Additional Standard Glass Cylinder Assembly. Includes glass chamber, implosion guard and gaskets.
13530 Standard Coating Shield Assembly
27691 Extended Glass Cylinder Assembly. 220mm high (standard chamber is 133mm high). For increased source to sample distance and coating large samples.
11880 Extended Height Coating Shield Assembly
B5230. Tungsten filament basket – pack of 10 (for use with 10457 metal evaporation insert).
B5228. Molybdenum boats – pack of 10.
585 mm W x 521 mm D x 410 mm H
(total height with coating head open: 650 mm)
32.4 kg (packed: 42 kg)
725 mm W x 660 mm D x 680 mm H
Borosilicate glass 150 mm ID x 133 mm H
115.5mm W x 86.4mm H (active area), 640 RGB x 480 (display format), capacitive touch colour display
Full graphical interface with touch screen buttons, includes features such as a log of the last 1000 coatings and reminders for when maintenance is due.
Disc-style 57 mm Ø. A 0.3 mm thick chromium (Cr) is fitted as standard. V S and V ES versions only
50 mm Ø rotation stage with rotation speed of 8-20 rpm. Other stages available on request.
Rotary pump: 5 m3/hr two-stage rotary pump with oil mist filter. Hydraulically-formed bellows stainless-steel backing line.
Turbo pump: Internally mounted 67 L/sec for N2, air-cooled
Vacuum Measurement: Wide range gauge (10428)
Ultimate vacuum: 1 x 10-6 mbar*
Pump down time: 5×10-6 mbar in 30 mins*
Sputter vacuum range: Between 5 x 10-3 and 1 x 10-1mbar for gold targets
*Typical ultimate vacuum of the pumping system in a clean instrument after pre-pumping and venting with dry nitrogen gas
Sputtering: Sputter current 1-150 mA to a predetermined thickness (with optional FTM) or by the built-in timer. The maximum sputtering time is 60 minutes (without breaking vacuum and with automatically built-in cooling periods)
Evaporation: Carbon evaporation using rods/cord. Thermal evaporation of metals from filaments or boats. For cleaning TEM apertures a standard molybdenum boat (supplied) can be fitted
A large multi-colour status indicator light provides a visual indication of the state of the equipment, allowing users to easily identify the status of a progress at a distance.
The indicator LED shows the following states:
• Initialisation
• Process running
• Idle
• Coating in progress
• Process completed
• Process ended in fault condition
Audio indication also sounds on completion of the process.
