Q300T D Plus Dual Target Sequential Sputtering System
Includes a 57 mm Ø x 0.3 mm chromium (Cr) target (TK8845) and a 57 mm Ø x 0.1 mm thick gold (Au) target (SC502-314A). A flat rotation stage for 4″/100 mm wafers is included.
Rotary pump requirements
13034. 5 m3/hr Pfeiffer DUO 6 two-stage rotary vacuum pump. Includes vacuum hose, coupling kit and oil mist filter.
Dry pumping options:
11540. Diaphragm pump. A ‘dry’ alternative to the standard 13034 oil-based rotary pump, complete with vacuum hose, coupling kit and oil mist filter.
26907. Edwards dry scroll pump nXDS10i. Pumping speed: 11.4 m/3hr.
Options and accessories
10357. Rotating 50 mm Ø specimen stage with adjustable tilt. The platform has six specimen stub positions for 15 mm, 10 mm, 6.5 mm or 1/8″ pin stubs. Stage rotation speed is variable between preset limits.
NB: Target to stage height is variable between 0-42 mm for the standard stage. When used with the extended height cylinder (optional accessory 10596) the target to stage height is an additional 87 mm.
10067. 50 mm Ø variable height specimen stage. Has six stub positions for 15 mm, 10 mm, 6.5 mm disc stubs.
10360. 50 mm Ø “Rotacota” stage. A rotary planetary-style stage with variable tilt angle from horizontal to 30º. The platform has six positions for either 15 mm, 10 mm, 6.5 mm disc stubs or 1/8″ pin stubs. Rotation speed is variable between preset limits.
Note: Depending on specimen height, this stage may require the optional extended height cylinder.
10358. 90 mm Ø specimen stage for glass microscope slides. For up to two 75 mm x 25 mm slides or a single 75 mm x 50 mm slide). The stage can alternatively accommodate up to six 1/8″ SEM pin stubs. The stage rotation speed is variable between preset limits and includes a gear box to allow the optional FTM to be used.
10779. Dual channel film thickness monitor (FTM). A fully integrated system using the Q300T D touch screen display for the control and display of all FTM functions. Allows automatic termination of the sputtering process at pre-selected thickness values. Displays rate for sputtering processes in nm/m, with a resolution of 0.1 nm. Two FTM crystal holders are fixed in the chamber to give optimal position for both targets and to coat one material per crystal. Includes two spare C5460 quartz crystals
C5460. Spare quartz crystal.
10596. Extended height vacuum chamber. (214 mm H – the standard chamber is 127mm H). Recommended for increased source-to-specimen distance and for coating large specimens.
10422. Rotating vacuum spigot. Allows a more convenient connection of the vacuum pump hose to the rear of the coater for when bench depth is limited.
11223. Lockable emergency stop (e-stop) switch. This can be mounted on top of the system in a position easily accessible for the operator. It is provided with a key to release the knob after activation. NB: The addition of the e-stop does not inhibit or replace the normal on/off switch function.
11576. Coating shields. Can be fitted to protect large surfaces from coating deposition – easily removable for ease of cleaning.
10428. Full range, active vacuum gauge. Capable of measurement over the range of 1,000 mbar to 5 x 10-9 mbar. Typical ultimate vacuum of system is 5 x 10-5mbar. Must be factory fitted.
11288. Spares Kit. Includes one TK8845 chromium target, one SC502-314A 57 mm Ø x 0.1 mm gold (Au) sputter target, standard glass cylinder assembly (10595), C5460 quartz crystals and fuses.
Note: The Q300T D Plus is fitted as standard with a 57 mm Ø x 0.3 mm chromium (Cr) target (TK8845) and 57 mm Ø x 0.1 mm gold (Au) target (SC502-314A). All targets are 57 mm in diameter but thicknesses vary:
TK9000. Aluminium (Al) 0.76 mm.
TK8869. Carbon (C) 1.5 mm/
TK8845.Chromium (Cr) 0.3 mm
TK8862. Chromium (Cr) 1.5 mm
TK8900. Cobalt (Co) 0.1 mm
TK8870. Copper (Cu) 0.1 mm
TK8889. Gold (Au) 0.3 mm
TK8859.Gold (Au) 0.1 mm
TK8860. Gold/palladium (Au/Pd) 0.1 mm
TK8891. Gold/palladium (Au/Pd) (60:40) 0.3 mm
TK8907. Indium tin oxide (ITO) Ø x 3 mm
TK8899. Iridium (Ir) 0.2 mm
TK8897. Iron (Fe) 0.1 mm
TK8905. Magnesium (Mg) 0.3 mm
TK8903. Molybdenum (Mo) 0.1 mm
TK8872. Nickel (Ni) 0.1 mm
TK8877. Palladium (Pd) 0.1 mm
TK8861. Platinum (Pt) 0.1 mm
TK8893. Platinum (Pt) 0.3mm
TK8878. Platinum/palladium (Pt/Pd) (80:20) 0.1 mm
TK8887. Platinum/palladium (Pt/Pd) (80:20) 0.3 mm
TK8871. Silver (Ag) 0.1 mm
TK8906. Tantalum (Ta) 0.1 mm
TK8902.Tin (Sn) 0.1 mm
TK8879. Titanium (Ti) 1.5 mm
TK8895. Titanium (Ti) 0.5 mm
TK8846. Tungsten (W) 0.5 mm
TK8867. Tungsten 0.2 mm