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Edwards "Fomblinised" RV3 Rotary Pump

Key features
  • Recommended for use with the Quorum K1050X RF Plasma Reactor
  • High reliability - generous lubrication of moving parts
  • Quiet running with intrusive frequencies minimised

The Edwards Fomblinised RV3 rotary pump is supplied as standard with the K1050X RF Plasma Etcher/Asher/Cleaner and use is essential if oxygen is to be used as a process gas. 

The pump has been especially modified and cleaned to accept Fomblin® oil, which is compatible with oxygen gas in normal operation.
EK3176. Edwards Fomblinised RV3 rotary pump.
E5005Z. Fomblin® oil, 1 Kg (spare).