10417. Q150R S. Rotary-Pumped Sputter Coater, including an SC502-314A 57 mm Ø x 0.1 mm gold (Au) sputter target.
10419. Q150R E. Rotary-Pumped SEM Carbon Coater suitable for SEM applications. Fitted with a carbon fibre evaporation insert. Supplied with 1 m of standard carbon fibre cord (C5421).
10418. Q150R ES. Rotary-Pumped Sputter Coater and SEM Carbon Coater, including an SC502-314A 57 mm x Ø 0.1 mm gold (Au) target and 1 m of carbon carbon fibre cord (C5421).
Rotary pump requirements
13034. Vacuum pump. 5 m3/hr Pfeiffer DUO 6 two-stage rotary pump with oil mist filter. See: Rotary Pumps and Dry Pumps for details.
Options and accessories
Head inserts and glow discharge
10879. Carbon rod evaporation insert for 3.05 mm Ø rods (R E and R ES only). Includes carbon rod shaper 13232 and wedge tool 2097. C5422 (3.05 mm Ø x 300 mm packet of ten) carbon rods.
10726. Additional sputter insert for quick metal change (RE and R ES version only). NB: this is an entire sputtering assembly - individual targets can also be purchased
10262. Glow discharge insert. Used to modify surface properties (e.g. hydrophobic to hydrophilic conversion) (R S and R ES versions only). Can be retrofitted.
All rotating stages have variable rotation of between 8 and 20 rpm.
10357. Variable tilt angle specimen stage. With adjustable tilt up to 900 x 50 mm Ø and a specimen platform with six stub positions for 15 mm or 6.5 mm or 1/8" pin stubs
10360. Variable angle, rotary planetary specimen stage. A 50 mm Ø specimen platform with six stub positions for 15 mm or 6.5 mm or 1/8" pin stubs.
10358. Specimen stage for glass microscope slides (up to two x 75 mm x 25 mm slides). Includes a gear box to allow the optional FTM to be used.
10458. Flat rotation specimen stage for 4"/100 mm wafers. Includes gear box for increased coating area coverage.
10787. 4” wafer stage.
10808. Eight-place stub stage. For 25 mm and 30 mm Ǿ stubs
10856. 14-place stub stage. For 25 mm and 30 mm Ǿ stubs
11847. Fibre stage. Rotates fibres (up to 1 mm Ǿ) to ensure even coating on all sides.
12043. Cover slip stage. 92 mm Ǿ stage accepts nine 20 x 20 mm cover slips.
12305 Four-place 25 mm stub stage
Other options and accessories
10454. Film thickness monitor (FTM) attachment. Including oscillator, feed-through, quartz crystal holder and quartz crystals.
C5460. Spare quartz crystal.
10429. Extended height vacuum chamber. (214 mm high - the standard chamber is 127 mm high). For increased source-to- specimen distance and for coating large specimens.
10422. Rotating vacuum spigot. Allows a more convenient connection of the vacuum hose to the rear of the Q150R - useful for when bench depth is limited.
13530. Standard coating shield assembly.
11880. Extend height coating shield assembly.
13711. Platinum coating vacuum hose assembly. Recommended for if platinum (Pt) is to be sputtered (R S and R ES versions only)
The Q150R S and Q150R ES are fitted as standard with a 0.1 mm thick gold (Au) target (SC502-314A). Targets are 57 mm Ø x 0.1 mm thick (unless specified otherwise).
SC502-314A. Gold (Au).
SC502-314A/0.2 mm. Gold (Au) 0.2 mm.
TK8889. Gold (Au) 0.3 mm.
TK8891. Gold/palladium (Au/Pd - 80:20) 0.3 mm.
SC502-314B. Gold/palladium (Au/Pd).
SC502-314B/0.2mm. Gold/palladium (Au/Pd - 80:20) 0.2 mm.
SC502-314C. Platinum (Pt).
SC502-314C/0.2mm. Platinum (Pt) 0.2 mm.
TK8893. Platinum (Pt) 0.3 mm.
TK8887. Platinum/palladium (Pt/Pd - 80:20%) 0.3 mm.
SC502-314E. Silver (Ag).
SC502-314G. Palladium (Pd).
SC502-314H. Copper (Cu).
A0830A. Carbon rods - 6.15 mm Ø x 100 mm length (unshaped) - pack of 10.
C5421. Carbon fibre cord - 1 m.
C5421-10. Carbon fibre cord - 10 m.
C5421-100. Carbon fibre cord - 100 m.
13232. Manual carbon rod shaper 1.2 mm and 1.4 mm Ø carbon rods.
Other consumables and spare kits
10730. Two-year spares kit for Q150R S. Includes: SC502-314A 57 mm Ø x 0.1 mm gold (Au) target, standard glass chamber assembly, C5460 quartz crystals, O-rings etc.
10729. Two-year spares kit for Q150R E. Includes: C5421 carbon fibre cord, standard glass chamber assembly, C5460 quartz crystals, O-rings, springs etc.
10728. Two-year spares kit for Q150R ES. Includes: SC502-314A 57 mm Ø x 0.1 mm gold (Au) target, C5421 carbon fibre cord, standard glass chamber assembly, C5460 quartz crystals, O-rings, springs etc.