10027. Q150T S. High Resolution Turbomolecular-Pumped Sputter Coater, including a TK8845 54mm Ø x 0.3 mm chromium (Cr) target.
10028. Q150T E. Turbomolecular-Pumped Carbon Evaporator, suitable for TEM and SEM applications. Fitted with a carbon rod evaporation insert for 3.05mm Ø carbon rods. Supplied with carbon rods (C5422 3.05 mm Ø x 100 mm) and a carbon rod shaper (manual operation).
10029. Q150T ES. High Resolution Turbomolecular-Pumped Sputter Coater and Carbon Evaporator, including a TK8845 57 mm Ø x 0.3 mm chromium (Cr) target and a 10879 high vacuum carbon rod evaporation insert for 3.05 mm Ø carbon rods. Coating inserts are interchangeable.
Rotary pump requirements
13034. Pfeiffer 5 m3/hr DUO 6 two-stage rotary pump with oil mist filter.
Dry pumping options:
11540. Diaphragm pump. Vacuubrand MD1 23 L/m.
20063. Scroll pump. Edwards nXDS6i.
For further information see: Rotary Pumps and Dry Pumps for details.
Options and accessories
Head inserts and glow discharge
10879. Carbon rod evaporation insert for 3.05 mm Ø rods (T E and T ES only). Includes carbon rod shaper 13232 and wedge tool 2097. C5422 (3.05 mm Ø x 300 mm packet of ten) carbon rods.
10455. Carbon fibre insert. Supplied with 2 m C5421 carbon fibre cord. For additional carbon see: Carbon Supplies (below).
10457. Metal evaporation and aperture insert. Including the ability to evaporate upwards or downwards (TE and TES version only). Supplied with a pack of 10 tungsten filaments (B5230) and a molybdenum (Mo) boat.
10453. Additional sputter insert for quick metal change (TE and TES version only). NB: this is an entire sputtering assembly - individual targets can also be purchased
10262. Glow discharge insert. Used to modify surface properties (e.g. hydrophobic to hydrophilic conversion) (R S and R ES versions only). Can be retrofitted.
All rotating stages have variable rotation of between 8 and 20 rpm.
10357. Variable tilt angle specimen stage. With adjustable tilt up to 900 x 50 mm Ø and a specimen platform with six stub positions for 15 mm or 6.5 mm or 1/8" pin stubs
10360. Variable angle, rotary planetary specimen stage. A 50 mm Ø specimen platform with six stub positions for 15 mm or 6.5 mm or 1/8" pin stubs.
10358. Specimen stage for glass microscope slides (up to two x 75 mm x 25 mm slides). Includes a gear box to allow the optional FTM to be used.
10458. Flat rotation specimen stage for 4"/100 mm wafers. Includes gear box for increased coating area coverage.
10787. 4” wafer stage.
10808. Eight-place stub stage. For 25 mm and 30 mm Ǿ stubs
10856. 14-place stub stage. For 25 mm and 30 mm Ǿ stubs
11847. Fibre stage. Rotates fibres (up to 1 mm Ǿ) to ensure even coating on all sides.
12043. Cover slip stage. 92 mm Ǿ stage accepts nine 20 x 20 mm cover slips.
12305 Four-place 25 mm stub stage
Other options and accessories
10454. Film thickness monitor (FTM) attachment. Including oscillator, feed-through, quartz crystal holder and quartz crystals.
C5460. Spare quartz crystal.
10428. Full range gauge for high vacuum measurement.
10429. Extended height vacuum chamber. (214 mm high - the standard chamber is 127 mm high). For increased source-to- specimen distance and for coating large specimens.
10422. Rotating vacuum spigot. Allows a more convenient connection of the vacuum hose to the rear of the Q150T - useful for when bench depth is limited.
13530. Standard coating shield assembly.
11880. Extend height coating shield assembly.
The Q150T S and Q150T ES are fitted as standard with a 0.3 mm thick chromium (Cr) target (TK8845). All targets are 57 mm in diameter and 0.1 mm thick unless otherwise stated.
SC502-314A. Gold (Au).
SC502-314A/0.2mm. Gold (Au) 0.2 mm.
TK8889. Gold (Au) 0.3 mm.
SC502-314B. Gold/palladium (Au/Pd - 80:20).
SC502-314B/0.2mm. Gold/palladium (Au/Pd - 80:20%) 0.2 mm.
TK8891. Gold/palladium (Au/Pd - 80:20) 0.2 mm.
SC502-314C. Platinum (Pt).
SC502-314C/0.2mm. Platinum (Pt) 0.2 mm.
TK8893. Platinum (Pt) 0.3 mm.
SC502-314D. Nickel (Ni).
SC502-314E. Silver (Ag).
SC502-314G. Palladium (Pd).
SC502-314H. Copper (Cu).
TK8878. Platinum/Palladium (Pt/Pd - 80:20).
TK8887. Platinum/Palladium (Pt/Pd - 80:20) 0.3 mm.
TK8845. Chromium (Cr) 0.3 mm.
TK8862. Chromium (Cr)1.5 mm.
TK8867. Tungsten (W) 0.2 mm.
TK8846. Tungsten (W) 0.5 mm.
TK8869. Carbon (C) 1.5 mm.
TK8875. Aluminium (Al) 1 mm.
TK8895. Titanium (Ti) 0.5 mm.
TK8879. Titanium (Ti) 1.5 mm.
TK8897. Iron (Fe).
TK8899. Iridium (Ir) 0.3 mm.
TK8900. Cobolt (Co) 0.3 mm.
TK8902. Tin (Si).
TK8905. Magnesium (Mg) 0.3 mm thick.
TK8906. Tantalum (Ta).
TK8907. Indium tin oxide (ITO)
A0830A. Carbon rods - 6.15 mm Ø x 100 mm length (unshaped) - pack of 10.
A0832A. Carbon rods - 6.15 mm Ø x 50 mm length (shaped) - pack of 10.
A0834A: Carbon rods 3.05 Ø x 50 mm, (shaped) - pack of 10.
C5422. Carbon rods 3.05 Ø x 100 mm, (unshaped) - pack of 10.
C5421. Carbon fibre cord - 1 m.
C5421-10. Carbon fibre cord - 10 m.
C5421-100. Carbon fibre cord - 100 m.
S8650. Manual carbon rod shaper for 6.15 mm Ø carbon rods.
13232. Manual carbon rod shaper for 3.05 mm Ø carbon rods.
Other consumables and spare parts
B5230. Tungsten filament basket - pack of 10 (for use with 10457 metal evaporation insert).
B5228. Molybdenum boats - pack of 10.
G6260. Glass cylinder 6" diameter.
10068. Additional glass cylinder assembly.
10429. Extended glass cylinder assembly.
13233. Supergrade 'A' rotary pump oil - 1 L.
13235. Supergrade 'A' rotary pump oil - 5 L.
O7803. Oil mist filter.
10447. Two-year spares kit for Q150T S.
10448. Two-year spares kit for Q150T E.
10449. Two-year spares kit for Q150T ES.
16030015. Ceramic fuse (10 A).