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Q300T T Plus - triple target sputter coater for specimens up to 200mm diameter

The Q300T T Plus is a large chamber, turbo-pumped coating system, ideally suited for sputtering a single large diameter specimen up to 8"/200mm or multiple smaller specimens over a similar diameter. Ideal for thin-film applications and SEM/FE-SEM. It is fitted with three sputtering heads to ensure even deposition of individual large specimens or multiple specimens. 

NB: Please note it is not possible to sequentially sputter three different sputtering metals from each sputtering head - for sequential coating see the Q300T D Plus. 


Key features
  • Ultimate vacuum of 1x10-6mbar or less possible
  • New touch and swipe capacitive screen
  • USB port for upgrades and download of process log files
  • Multiple-use profiles can be set up on one machine
  • New software sorts recipes per user according to recent use
  • 16GB of memory can store more than 1000 recipes
  • New multi-colour LED visual status indicator
  • Interchangeable stage options
  • Three sputter heads for larger area deposition of different materials
Click to download Brochure

Recommended applications for Q300T T Plus: 

  • Wafer Inspection 
  • Multiple sample preparation for SEM
These products are for Research Use Only. 

Detachable chamber with built-in implosion guard   

Removable glass chamber and easily accessible base and top plate allows for an easy cleaning process. 
Users can rapidly change the chamber, if necessary, to avoid cross contamination of sensitive samples. 
Tall chamber option is available for improved uniformity for sputtering and to hold larger substrates.

Triple Target Sputtering System   

The Q300T T Plus is fitted with three individual sputtering heads to ensure even deposition of individual large specimens or multiple specimens. For economical coating of small specimens, ‘single target’ mode can be selected. They are ideal coaters for the preparation of large specimens for examination by SEM, FEG-SEM. To ensure even deposition, the Q300 Plus series of coaters are fitted with a rotating specimen stage and three individual magnetron target assemblies, which enhance the efficiency of the process by using low voltages.


Multiple stage options  

The Q300T T Plus has specimen stages to meet most requirements. All are easy-change, drop-in style (no screws) and the rotation speed is variable between pre-set limits.
Flat rotation stage for 200 mm/8” and 150 mm/6” wafers (fitted as standard).

Safety  

The Q300T T Plus meets key industry CE standards
• All electronic components are protected by covers 
• Implosion guard prevents user injury in event of chamber failure 
• Vacuum interlocks remove power from deposition 
sources to prevent user exposure to high voltage
in event of chamber being opened 
• Overheating protection shuts down power supply
 

Vacuum control     

High vacuum turbo pumping allows sputtering of a wide range of oxidising and non-oxidising metals for thin film and electron microscopy applications. Automatic vacuum control which can be pre-programmed to suit the process and material, therefore removing the need for manual intervention or control.  

Cool magnetron sputtering    

Sputter coating is a technique widely used in various applications; it is possible to create a plasma and sputter metals with high voltage, poor vacuum and no automation.  However, this is not suitable for electron microscopy applications because it can heat the sample and result in damage when the plasma interacts with the sample. The Q series uses low temperature enhanced-plasma magnetrons optimised for the turbomolecular pump pressures, combined with low current and deposition control, which ensures your sample is protected and uniformly coated.  

The Q300T T Plus uses easy-change, 57 mm diameter, disc-style targets which are designed to sputter oxidising and noble metals. The Q300T T Plus is fitted as standard with a chromium (Cr) sputter target. Other targets options include; Au, Au/Pd, Pt/Pd, Pd, Pt, Cu, Ir, W, ITO and Al etc.

Pulsed cleaning for aluminium sputtering    

Aluminium (Al) rapidly forms an oxide layer which can be difficult to remove. The Q300T T Plus has a special recipe for aluminium that reduces the oxide removal time and prevents excessive pre-sputtering of the target.
Film thickness monitor     
The Q300T T Plus can be fitted with an optional film thickness monitor (FTM), which measures the coating thickness on a quartz crystal monitor within the chamber, in order to control the coating thickness of material deposited on to the sample. 



10824. Q300T T  Plus Triple Target, Large Chamber, Turbo-Pumped Sputter Coater

Fitted with three sputtering heads to ensure even metal deposition. Includes three 57 mm Ø x 0.3 mm chromium (Cr) sputter targets (TK8845). A 10826 flat rotation stage for 200 mm/8" and 150 mm/6" wafers is fitted as standard.


Rotary pump requirements

13034. Rotary pump. 5 m3/hr Pfeiffer Duo 6 two-stage rotary vacuum pump. Includes vacuum hose, coupling kit and oil mist filter.

Dry pumping options:

26907. Edwards dry scroll pump nXDS10i. Pumping speed: 11.4 m/3hr.

11540. VacuuBrand MD1 diaphragm pump.


Options and accessories

Specimen stages

10357. Rotating 50 mm Ø specimen stage with adjustable tilt.

The platform has six specimen stub positions for 15 mm, 10 mm, 6.5 mm or 1/8" pin stubs. Stage rotation speed is variable between preset limits. No rotation when in 'single target' mode.

Target-to-stage height is variable between 0-42 mm for the standard stage. When used with the extended height cylinder (optional accessory 10596) the target to stage height is an additional 87 mm.

10067. 50 mm Ø variable height specimen stage with six stub positions for 15 mm, 10 mm, 6.5 mm disc stubs.

10360. 50 mm Ø "Rotacota" stage. A rotary planetary-style stage with variable tilt angle from horizontal to 30º. The platform has six positions for either 15 mm, 10 mm, 6.5 mm disc stubs or 1/8" pin stubs. Rotation speed is variable between preset limits. Depending on specimen height, this stage may require the optional extended height cylinder.

10358. 90 mm Ø specimen stage for glass microscope slides. Designed to hold two x 75 mm x 25 mm slides or a single 75 mm x 50 mm slide. The stage can alternatively accommodate up to six 1/8" SEM pin stubs. The stage rotation speed is variable between preset limits and includes a gear box to allow the optional FTM to be used.


Other options

11520. Film thickness monitor (FTM). Including oscillator, feed-through, quartz crystal holder and one C5460 quartz crystal.

C5460. Spare quartz crystal.

10596. Extended height vacuum chamber 214 mm H (the standard chamber is 127 mm H). Recommended for increased source-to-specimen distance and for coating large specimens.

10422. Rotating vacuum spigot. Allows a more convenient connection of the vacuum pump hose to the rear of the Q300T T when bench depth is limited.

11223. A lockable emergency stop (e-stop) switch. This can be mounted on top of the system in a position easily accessible for the operator and has a key to release the knob after activation. The addition of the e-stop does not inhibit or replace the normal on/off switch function.

11577. Coating shields. To protect large surfaces from coating deposition - removable for ease of cleaning.

10428. Full range, active vacuum gauge. Capable of measurement over the range of 1,000 mbar to 5 x 10-9mbar. Typical ultimate vacuum of system is in the region of 5 x 10-5mbar. Must be factory fitted.

11289. Spares kit. Including: spare standard glass cylinder, three 57 mm Ø x 0.3 mm chromium (Cr) targets (TK8845), vacuum tubing with coupling insert, argon gas tubing, three sputter head magnets, rotary pump oil mist filter and fuses.


Sputter targets

The Q300T T is fitted as standard with three 57 mm Ø x 0.3 mm chromium (Cr) targets (TK8845). 

Other optional targets are available (three required) 0.1 mm thick unless otherwise stated.

SC502-314A. Gold (Au) 

SC502-314A/0.2 mm. Gold (Au) 0.2 mm 

SC502-314B. Gold/palladium (Au/Pd - 80:20)

SC502-314B/0.2 mm. Gold/palladium (Au/Pd - 80:20) 0.2 mm

SC502-314C. Platinum (Pt)

SC502-314C/0.2 mm. Platinum (Pt) 0.2 mm

SC502-314D. Nickel (Ni)

SC502-314E. Silver (Ag)

SC502-314G. Palladium (Pd) 

SC502-314H. Copper (Cu)

TK8875. Aluminium (Al)

TK8869. Carbon (C) 1.5 mm

TK8845. Chromium (Cr) 0.3 mm 

TK8862. Chromium (Cr) 1.5 mm 

TK8900. Cobalt (Co)

TK8889. Gold (Au) 0.3 mm

TK8891. Gold/palladium (Au/Pd - 80:20) 0.3 mm

TK8907. Indium tin oxide (ITO) 3 mm

TK8899. Iridium (Ir) 0.3 mm

TK8897. Iron (Fe)

TK8905. Magnesium (Mg) 0.5 mm 

TK8903. Molybdenum (Mo)

TK8893 Platinum (Pt) 0.3 mm

TK8887. Platinum/palladium (Pt/Pd - 80:20) 0.3 mm

TK8906. Tantalum (Ta)

TK8902. Tin (Sn) 

TK8879. Titanium (Ti) 1.5 mm 

TK8895. Titanium (Ti) 0.5 mm 

TK8846. Tungsten (W) 0.5 mm 

TK8867. Tungsten (W) 0.2 mm

Instrument case

590mm W x 535mm D x 420mm H (maximum height during the opening of the coating head: 772mm)

Weight 

36 kg (packed: 59kg)

Packed dimensions 

730 mm W x 630 mm D x 690 mm H

Work chamber

Borosilicate glass with integral PET implosion guard Size 300 mm outside diameter x 127 mm High

Display 

115.5mm W x 86.4mm H (active area), 640 RGB x 480 (display format), capacitive touch colour display

User interface  

Full graphical interface with touch screen buttons, includes features such as a log of the last 1000 coatings and reminders for when maintenance is due

Specimen stage  

A flat rotation stage for 6”(150mm) and 8” (200mm) wafers is fitted  as standard. 
A rotating/tilt stage and the  ‘rota cota’ rotary tilt stage are also options 

Vacuum   

Rotary pump:  Rotary pump – 4 m3/hr, two stage rotary  pump with oil mist filter for the Q300T T Plus
Turbo pump: Turbo pump – Internally mounted 70L/sec air cooled 
Vacuum Measurement: Pirani gauge as standard, full range gauge  available as an option
Ultimate vacuum: 5 x 10-5mbar*
Sputter vacuum range: 5x10-2 to 5x10-3 mbar*

*Typical ultimate vacuum of the pumping system in a clean instrument after pre-pumping and venting with dry nitrogen gas

Processes

Sputter Deposition Current:
Single target: 1 - 140mA
All targets: 60 - 420mA

Visual status indicator   

A large status multi-colour indicator light provides a visual indication of the state of the equipment, allowing users to easily identify the status of a process at distance. 

The indicator LED shows the following states:  
• Initialisation
• Process running
• Idle
• Coating in progress
• Process completed
• Process ended in fault condition
Audio indication also sounds on completion of the process.   

Services  

Gases: process gas argon, 99.999% Nominal 5 psi