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Applied Surface Science, 2025

Optimized dose modulation for controlled greyscale electron beam lithography for negative tone resist

Olli Ovaskainen, Tian-Long Guo, Matthieu Roussey

Applied Surface Science, 2025

https://doi.org/10.1016/j.apsusc.2025.163638

Products:

Q300T T Plus

Sectors:

Biomaterials & Nanomaterials