RotaQ ES
Rotary pumped coater suitable for sputtering non-oxidising metals (Au, Au/Pd, Ag, Pt, and Pt/Pd), and carbon evaporation.
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Key Features
- Turbomolecular pumped system with ultimate vacuum of 1x10⁻⁶ mbar, enabling high quality coatings
- Triple head design offering even deposition of thin film coatings across samples up to 8” in diameter
- Optimised planetary stages for deposition across 6” and 8” diameter samples
- Integrated Film Thickness Monitor (FTM) to control deposition of coating
- Intuitive and responsive touchscreen colour panel design
- Multi-colour LED visual status indicator offering process updates
- Pre-set recipes for standard protocols resulting in sample reproducibility
- Customisable recipes enabling users to tailor process parameters to their specific requirements
- Compatible with a range of target materials
Details
High Throughput Thin Film Deposition System
The TriQ is an automated and versatile large chamber triple head sputter coater offering unparalleled ease of use and flexibility based on your application needs. Recommended for controlled thin film deposition for electron microscopy sample preparation and material fabrication.
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