RotaQ ES
Rotary pumped coater suitable for sputtering non-oxidising metals (Au, Au/Pd, Ag, Pt, and Pt/Pd), and carbon evaporation.
Key Features
- Capable of achieving vacuum of 5x10⁻⁵ mbar
- Touch and swipe capacitive screen
- USB port for upgrades and download of process log files
- Multiple-user profiles can be set up on one instrument
- 16GB of memory can store more than 1000 recipes
- Multi-colour LED visual status indicator
- Chromium target as standard
- Capable of sputtering non-oxidizing and oxidizing metals e.g. Cr, Ir, W, Al, Ti, Au, Pt
Details
The Q150T S Plus is a turbomolecular pumped sputter coater system. The turbomolecular pump enables the sputtering of oxidising metals, which have a lower grain size suitable for high-resolution imaging.
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