RotaQ ES
Rotary pumped coater suitable for sputtering non-oxidising metals (Au, Au/Pd, Ag, Pt, and Pt/Pd), and carbon evaporation.
Key Features
- Capable of achieving vacuum of 1x10⁻⁶ mbar
- Cr target as standard
- Capable of sputtering non-oxidizing and oxidizing metals e.g. Cr, Ir, W, Al, Ti, Au, Pt
- Capable of carbon rod evaporation (carbon fibre evaporation available as option)
- Multi-colour LED visual status indicator
- 16GB of memory can store more than 1000 recipes
- Multiple-user profiles can be set up on one instrument
- Touch and swipe capacitive screen
- Standard and extended height glass chamber included as standard
Details
The Q150V ES Plus is a turbomolecular pumped combined sputter coater and carbon evaporation system, optimised for high vacuum applications. Together with the use of a wide-range Penning/Pirani gauge, this enables the sputtering of oxidising metals with ultra-fine grain sizes, which are suitable for high resolution imaging. This also allows for ultra-fine coatings of carbon for use in TEM imaging. The deposition head inserts can be swapped in seconds. Metal evaporation/aperture cleaning option available.
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